Tsuyoshi Matsuzaki

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Nakakubiki-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Polishing method for wafer and holding plate
- Patent number 6,402,594
- Issue date Jun 11, 2002
- Shin-Etsu Handotai Co., Ltd.
- Daisuke Kobayashi
- B24 - GRINDING POLISHING