Tsuyoshi Moriya

Person

Nirasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming apparatus
- Patent number 12,027,344
- Issue date Jul 2, 2024
- Tokyo Electron Limited
- Shinya Iwashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing device, and plasma processing method
- Patent number 12,020,900
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Munehito Kagaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon hard mask, film forming apparatus, and film forming method
- Patent number 11,993,849
- Issue date May 28, 2024
- Tokyo Electron Limited
- Masaru Hori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Contaminant detection system, contaminant detecting method, and sem...
- Patent number 11,776,105
- Issue date Oct 3, 2023
- Tokyo Electron Limited
- Tsuyoshi Moriya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Etching method
- Patent number 11,721,557
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Tadashi Mitsunari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method
- Patent number 11,450,512
- Issue date Sep 20, 2022
- Tokyo Electron Limited
- Shinya Iwashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature measurement substrate and temperature measurement system
- Patent number 11,035,741
- Issue date Jun 15, 2021
- Tokyo Electron Limited
- Tadashi Mitsunari
- G01 - MEASURING TESTING
Information Patent Grant
Film forming method
- Patent number 10,872,764
- Issue date Dec 22, 2020
- Tokyo Electron Limited
- Shinya Iwashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 10,643,839
- Issue date May 5, 2020
- Tokyo Electron Limited
- Ayuta Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,121,680
- Issue date Nov 6, 2018
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method of processing apparatus, program for performing the...
- Patent number 9,627,184
- Issue date Apr 18, 2017
- Tokyo Electron Limited
- Tsuyoshi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method, etching apparatus, and ring member
- Patent number 9,441,292
- Issue date Sep 13, 2016
- Tokyo Electron Limited
- Ayuta Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate cleaning method and substrate cleaning device
- Patent number 9,209,010
- Issue date Dec 8, 2015
- Tokyo Electron Limited
- Hidefumi Matsui
- B08 - CLEANING
Information Patent Grant
Filtration filter and production method therefor
- Patent number 9,022,225
- Issue date May 5, 2015
- Tokyo Electron Limited
- Tsuyoshi Moriya
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Etching method, etching apparatus, and ring member
- Patent number 8,945,413
- Issue date Feb 3, 2015
- Tokyo Electron Limited
- Ayuta Suzuki
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Vacuum exhaust method and a substrate processing apparatus therefor
- Patent number 8,945,313
- Issue date Feb 3, 2015
- Tokyo Electron Limited
- Hidefumi Matsui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Turbomolecular pump, and particle trap for turbomolecular pump
- Patent number 8,894,355
- Issue date Nov 25, 2014
- Shimadzu Corporation
- Yukiteru Sekita
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Internal member of a plasma processing vessel
- Patent number 8,877,002
- Issue date Nov 4, 2014
- Tokyo Electron Limited
- Kouji Mitsuhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum apparatus including a particle monitoring unit, particle mon...
- Patent number 8,854,625
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Tsuyoshi Moriya
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,845,853
- Issue date Sep 30, 2014
- Tokyo Electron Limited
- Jun Yamawaku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle capture unit, method for manufacturing the same, and subst...
- Patent number 8,821,607
- Issue date Sep 2, 2014
- Tokyo Electron Limited
- Tsuyoshi Moriya
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Abnormality detection system, abnormality detection method, recordi...
- Patent number 8,751,196
- Issue date Jun 10, 2014
- Tokyo Electron Limited
- Tsuyoshi Moriya
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Reflecting device, communicating pipe, exhausting pump, exhaust sys...
- Patent number 8,727,708
- Issue date May 20, 2014
- Tokyo Electron Limited
- Tsuyoshi Moriya
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Particle sticking prevention apparatus and plasma processing apparatus
- Patent number 8,608,422
- Issue date Dec 17, 2013
- Tokyo Electron Limited
- Tsuyoshi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method
- Patent number 8,585,831
- Issue date Nov 19, 2013
- Tokyo Electron Limited
- Hidefumi Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate surface processing apparatus...
- Patent number 8,578,952
- Issue date Nov 12, 2013
- Tokyo Electron Limited
- Hiroshi Nagaike
- G01 - MEASURING TESTING
Information Patent Grant
Evacuation method and storage medium
- Patent number 8,516,715
- Issue date Aug 27, 2013
- Tokyo Electron Limited
- Jun Yamawaku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle generation factor determining system, charging method and...
- Patent number 8,498,911
- Issue date Jul 30, 2013
- Tokyo Electron Limited
- Tsuyoshi Moriya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate cleaning method and apparatus
- Patent number 8,475,602
- Issue date Jul 2, 2013
- Toyko Electron Limited
- Hidefumi Matsui
- B08 - CLEANING
Information Patent Grant
Gas purification apparatus and method
- Patent number 8,475,562
- Issue date Jul 2, 2013
- Tokyo Electron Limited
- Tsuyoshi Moriya
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD
- Publication number 20240331977
- Publication date Oct 3, 2024
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARBON HARD MASK, FILM FORMING APPARATUS, AND FILM FORMING METHOD
- Publication number 20240240324
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Masaru HORI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, MODEL DATA GENERATION APPARATUS, SU...
- Publication number 20240194507
- Publication date Jun 13, 2024
- TOKYO ELECTRON LIMITED
- Tsuyoshi MORIYA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MANAGEMENT APPARATUS, PREDICTION METHOD, AND PREDICTION PROGRAM
- Publication number 20240045388
- Publication date Feb 8, 2024
- TOKYO ELECTRON LIMITED
- Tsuyoshi MORIYA
- G05 - CONTROLLING REGULATING
Information Patent Application
MANAGEMENT SYSTEM, MANAGEMENT METHOD, AND MANAGEMENT PROGRAM
- Publication number 20240045401
- Publication date Feb 8, 2024
- Tokyo Electron Limited,
- Tsuyoshi MORIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DATA COLLECTION SYSTEM, DATA COLLECTION APPARATUS, DATA COLLECTION...
- Publication number 20230395411
- Publication date Dec 7, 2023
- TOKYO ELECTRON LIMITED
- Tsuyoshi MORIYA
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230386801
- Publication date Nov 30, 2023
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20230051432
- Publication date Feb 16, 2023
- TOKYO ELECTRON LIMITED
- Shinya IWASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD
- Publication number 20220165544
- Publication date May 26, 2022
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARBON HARD MASK, FILM FORMING APPARATUS, AND FILM FORMING METHOD
- Publication number 20220042173
- Publication date Feb 10, 2022
- TOKYO ELECTRON LIMITED
- Masaru HORI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND SEMICONDUCTOR PRODUCTION APPARATUS
- Publication number 20220010424
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Yusuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD
- Publication number 20210351040
- Publication date Nov 11, 2021
- Tadashi MITSUNARI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAMINANT DETECTION SYSTEM, CONTAMINANT DETECTING METHOD, AND SEM...
- Publication number 20210327045
- Publication date Oct 21, 2021
- TOKYO ELECTRON LIMITED
- Tsuyoshi MORIYA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210301402
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Yusuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Processing Method
- Publication number 20210142982
- Publication date May 13, 2021
- TOKYO ELECTRON LIMITED
- Shinya IWASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HARD MASK, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE PROCESSING AP...
- Publication number 20200370172
- Publication date Nov 26, 2020
- TOKYO ELECTRON LIMITED
- Tsuyoshi MORIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20190385815
- Publication date Dec 19, 2019
- TOKYO ELECTRON LIMITED
- Shinya IWASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE MEASUREMENT SUBSTRATE AND TEMPERATURE MEASUREMENT SYSTEM
- Publication number 20190120703
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Tadashi MITSUNARI
- G01 - MEASURING TESTING
Information Patent Application
FILM FORMING METHOD
- Publication number 20190088475
- Publication date Mar 21, 2019
- TOKYO ELECTRON LIMITED
- Shinya Iwashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180166298
- Publication date Jun 14, 2018
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20180158671
- Publication date Jun 7, 2018
- Ayuta SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY AND EXHAUST STRUCTURE
- Publication number 20180155830
- Publication date Jun 7, 2018
- Ayuta SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, MAINTE...
- Publication number 20170032983
- Publication date Feb 2, 2017
- TOKYO ELECTRON LIMITED
- Koshi MUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING FILTRATION FILTER
- Publication number 20150246317
- Publication date Sep 3, 2015
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
ETCHING METHOD, ETCHING APPARATUS, AND RING MEMBER
- Publication number 20150206763
- Publication date Jul 23, 2015
- TOKYO ELECTRON LIMITED
- Ayuta Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILTRATION FILTER AND PRODUCTION METHOD THEREFOR
- Publication number 20140008290
- Publication date Jan 9, 2014
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
INTERNAL MEMBER OF A PLASMA PROCESSING VESSEL
- Publication number 20130255881
- Publication date Oct 3, 2013
- TOKYO ELECTRON LIMITED
- Kouji MITSUHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING FILTRATION FILTER
- Publication number 20130240479
- Publication date Sep 19, 2013
- Tsuyoshi MORIYA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD FOR CALCULATING BILL FOR USE OF WATER PURIFICATION SYSTEM AN...
- Publication number 20130226752
- Publication date Aug 29, 2013
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WATER TREATMENT DEVICE AND WATER TREATMENT METHOD
- Publication number 20130193087
- Publication date Aug 1, 2013
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Tsuyoshi Moriya

Person

Patents Grantslast 30 patents

Film forming apparatus

Plasma processing device, and plasma processing method

Carbon hard mask, film forming apparatus, and film forming method

Contaminant detection system, contaminant detecting method, and sem...

Etching method

Plasma processing method

Temperature measurement substrate and temperature measurement system

Film forming method

Film forming apparatus and film forming method

Substrate processing apparatus

Cleaning method of processing apparatus, program for performing the...

Etching method, etching apparatus, and ring member

Substrate cleaning method and substrate cleaning device

Filtration filter and production method therefor

Etching method, etching apparatus, and ring member

Vacuum exhaust method and a substrate processing apparatus therefor

Turbomolecular pump, and particle trap for turbomolecular pump

Internal member of a plasma processing vessel

Vacuum apparatus including a particle monitoring unit, particle mon...

Substrate processing apparatus and substrate processing method

Particle capture unit, method for manufacturing the same, and subst...

Abnormality detection system, abnormality detection method, recordi...

Reflecting device, communicating pipe, exhausting pump, exhaust sys...

Particle sticking prevention apparatus and plasma processing apparatus

Substrate cleaning method

Substrate processing system, substrate surface processing apparatus...

Evacuation method and storage medium

Particle generation factor determining system, charging method and...

Substrate cleaning method and apparatus

Gas purification apparatus and method

Patents Applicationslast 30 patents

PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD

CARBON HARD MASK, FILM FORMING APPARATUS, AND FILM FORMING METHOD

SUBSTRATE PROCESSING APPARATUS, MODEL DATA GENERATION APPARATUS, SU...

MANAGEMENT APPARATUS, PREDICTION METHOD, AND PREDICTION PROGRAM

MANAGEMENT SYSTEM, MANAGEMENT METHOD, AND MANAGEMENT PROGRAM

DATA COLLECTION SYSTEM, DATA COLLECTION APPARATUS, DATA COLLECTION...

PLASMA PROCESSING APPARATUS

FILM FORMING APPARATUS

PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD

CARBON HARD MASK, FILM FORMING APPARATUS, AND FILM FORMING METHOD

FILM FORMING METHOD AND SEMICONDUCTOR PRODUCTION APPARATUS

ETCHING METHOD

CONTAMINANT DETECTION SYSTEM, CONTAMINANT DETECTING METHOD, AND SEM...

FILM FORMING APPARATUS AND FILM FORMING METHOD

Plasma Processing Method

HARD MASK, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE PROCESSING AP...

FILM FORMING APPARATUS

TEMPERATURE MEASUREMENT SUBSTRATE AND TEMPERATURE MEASUREMENT SYSTEM

FILM FORMING METHOD

SUBSTRATE PROCESSING APPARATUS

FILM FORMING APPARATUS AND FILM FORMING METHOD

GAS SUPPLY AND EXHAUST STRUCTURE

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, MAINTE...

METHOD FOR PRODUCING FILTRATION FILTER

ETCHING METHOD, ETCHING APPARATUS, AND RING MEMBER

FILTRATION FILTER AND PRODUCTION METHOD THEREFOR

INTERNAL MEMBER OF A PLASMA PROCESSING VESSEL

METHOD FOR PRODUCING FILTRATION FILTER

METHOD FOR CALCULATING BILL FOR USE OF WATER PURIFICATION SYSTEM AN...

WATER TREATMENT DEVICE AND WATER TREATMENT METHOD