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Tsuyoshi MURAKAMI

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  • Oshu-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Film forming apparatus
    • Patent number 8,833,298
    • Issue date Sep 16, 2014
    • Tokyo Electron Limited
    • Izumi Sato
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20130167772
    • Publication date Jul 4, 2013
    • TOKYO ELECTRON LIMITED
    • Izumi SATO
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...