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Tsuyoshi Ono

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  • Chofu-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing method
    • Patent number 6,642,149
    • Issue date Nov 4, 2003
    • Tokyo Electron Limited
    • Tomoki Suemasa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 6,089,181
    • Issue date Jul 18, 2000
    • Tokyo Electron Limited
    • Tomoki Suemasa
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Plasma processing method
    • Publication number 20030054647
    • Publication date Mar 20, 2003
    • Tomoki Suemasa
    • H01 - BASIC ELECTRIC ELEMENTS