Tsuyoshi OTSUKA

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,074,048
- Issue date Aug 27, 2024
- Tokyo Electron Limited
- Hiroki Harada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MOTOR CONTROL METHOD, TRANSFER DEVICE, AND STORING MEDIUM
- Publication number 20240120867
- Publication date Apr 11, 2024
- TOKYO ELECTRON LIMITED
- Youichi MASAKI
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210384058
- Publication date Dec 9, 2021
- TOKYO ELECTRON LIMITED
- Hiroki HARADA
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL