Tsuyoshi Shibata

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Fishkill, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Resist develop process having a post develop dispense step
- Patent number 5,897,982
- Issue date Apr 27, 1999
- Kabushiki Kaisha Toshiba
- Tsuyoshi Shibata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor device having antireflective layer containing organic...
- Patent number 5,744,293
- Issue date Apr 28, 1998
- Kabushiki Kaisha Toshiba
- Katsuya Okumura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist hardening process having improved thermal stability
- Patent number 5,648,198
- Issue date Jul 15, 1997
- Kabushiki Kaisha Toshiba
- Tsuyoshi Shibata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Micropattern forming method
- Patent number 5,422,205
- Issue date Jun 6, 1995
- Kabushiki Kaisha Toshiba
- Soichi Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY