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Tsuyoshi SOMA
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Tokyo, JP
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last 30 patents
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Patent Grant
Plating apparatus
Patent number
10,508,355
Issue date
Dec 17, 2019
Ebara Corporation
Akihiro Yazawa
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Patents Applications
last 30 patents
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Patent Application
TRANSFER APPARATUS, CLEANING MODULE, AND SUBSTRATE PROCESSING APPAR...
Publication number
20240001407
Publication date
Jan 4, 2024
EBARA CORPORATION
Asagi MATSUGU
B24 - GRINDING POLISHING
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Patent Application
PLATING APPARATUS
Publication number
20180087176
Publication date
Mar 29, 2018
EBARA CORPORATION
Akihiro YAZAWA
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR