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Tsuyoshi Takemoto
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Hyogo, JP
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last 30 patents
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Patent Grant
MEMS device formed inside hermetic chamber having getter film
Patent number
7,696,622
Issue date
Apr 13, 2010
Sumitomo Precision Products Co., Ltd.
Tsuyoshi Takemoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Angular velocity sensor with vibrator having ring portion and elect...
Patent number
7,637,156
Issue date
Dec 29, 2009
Sumitomo Precision Products
Ryuta Araki
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
MEMS DEVICE FORMED INSIDE HERMETIC CHAMBER HAVING GETTER FILM
Publication number
20090001565
Publication date
Jan 1, 2009
Tsuyoshi Takemoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Angular Velocity Sensor
Publication number
20070220972
Publication date
Sep 27, 2007
BAE STSTEMS PLC
Ryuta Araki
G01 - MEASURING TESTING