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Tsuyoshi TERAUCHI
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Yokohama-shi, JP
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last 30 patents
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Patent Grant
Film thickness measurement device and method
Patent number
8,093,913
Issue date
Jan 10, 2012
IHI Corporation
Hidetoshi Takimoto
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
FILM THICKNESS MEASUREMENT DEVICE AND METHOD
Publication number
20090267620
Publication date
Oct 29, 2009
Hidetoshi TAKIMOTO
G01 - MEASURING TESTING