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Tsuyoshi Tsunatori
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Nirasaki City, JP
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last 30 patents
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Patent Grant
Film forming method and film forming apparatus
Patent number
9,466,478
Issue date
Oct 11, 2016
Tokyo Electron Limited
Akira Shimizu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240274433
Publication date
Aug 15, 2024
TOKYO ELECTRON LIMITED
Tsuyoshi TSUNATORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20140295677
Publication date
Oct 2, 2014
TOKYO ELECTRON LIMITED
Akira Shimizu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...