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Tsuyoshi Umemoto
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Yamato, JP
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Patents Grants
last 30 patents
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Patent Grant
Power supply, a semiconductor making apparatus and a semiconductor...
Patent number
7,125,730
Issue date
Oct 24, 2006
Hitachi High-Technologies Corporation
Youji Takahashi
G01 - MEASURING TESTING
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Patent Grant
Power supply, a semiconductor making apparatus and a semiconductor...
Patent number
6,713,885
Issue date
Mar 30, 2004
Hitachi High-Technologies Corporation
Youji Takahashi
G01 - MEASURING TESTING
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Patent Grant
High-frequency power supply apparatus for plasma generation apparatus
Patent number
6,586,887
Issue date
Jul 1, 2003
Hitachi High-Technologies Corporation
Yasuo Oogoshi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Power supply, a semiconductor making apparatus and a semiconductor...
Publication number
20040056706
Publication date
Mar 25, 2004
Youji Takahashi
G01 - MEASURING TESTING
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Patent Application
Power supply, a semiconductor making apparatus and a semiconductor...
Publication number
20030162309
Publication date
Aug 28, 2003
Youji Takahashi
G01 - MEASURING TESTING