Tsuyoshi Wakabayashi

Person

Kofu, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and device for treating substrate
- Patent number 6,403,498
- Issue date Jun 11, 2002
- Tokyo Electron Limited
- Takenobu Matsuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic/electric components used in clean room and substrate tre...
- Patent number 6,337,365
- Issue date Jan 8, 2002
- Tokyo Electron Limited
- Takenobu Matsuo
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Instrument and mounting equipment used in clean room
- Patent number 6,077,894
- Issue date Jun 20, 2000
- Tokyo Electron Limited
- Misako Saito
- A43 - FOOTWEAR
Information Patent Grant
Air cleaning apparatus
- Patent number 5,514,196
- Issue date May 7, 1996
- Tokyo Electron Limited
- Takashi Tanahashi
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
Processing apparatus using gas
- Patent number 5,441,076
- Issue date Aug 15, 1995
- Tokyo Electron Limited
- Shuji Moriya
- G05 - CONTROLLING REGULATING
Information Patent Grant
Processing apparatus and flow control arrangement therefor
- Patent number 5,439,026
- Issue date Aug 8, 1995
- Tokyo Electron Limited
- Shuji Moriya
- G05 - CONTROLLING REGULATING
Information Patent Grant
Flow control apparatus
- Patent number 5,421,365
- Issue date Jun 6, 1995
- Tokyo Electron Limited
- Takenobu Matsuo
- G05 - CONTROLLING REGULATING
Information Patent Grant
Gas supply system
- Patent number 5,307,568
- Issue date May 3, 1994
- Tokyo Electron Limited
- Takenobu Matsuo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas measuring device and processing apparatus provided with the gas...
- Patent number 5,294,280
- Issue date Mar 15, 1994
- Tokyo Electron Limited
- Tsuyoshi Wakabayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for heat-treating a substrate
- Patent number 4,958,061
- Issue date Sep 18, 1990
- Tokyo Electron Limited
- Tsuyoshi Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS

Tsuyoshi Wakabayashi

Person

Patents Grantslast 30 patents

Method and device for treating substrate

Electronic/electric components used in clean room and substrate tre...

Instrument and mounting equipment used in clean room

Air cleaning apparatus

Processing apparatus using gas

Processing apparatus and flow control arrangement therefor

Flow control apparatus

Gas supply system

Gas measuring device and processing apparatus provided with the gas...

Method and apparatus for heat-treating a substrate