Tsuyoshi Yamaguchi

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Ebina, JP

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Patents Grantslast 30 patents

Information Patent Grant
Device for changing pitch between light beam axes, and substrate ex...
- Patent number 8,089,614
- Issue date Jan 3, 2012
- Hitachi Via Mechanics, Ltd.
- Yoshitada Oshida
- G02 - OPTICS
Information Patent Grant
Pattern exposure method and pattern exposure apparatus
- Patent number 7,372,478
- Issue date May 13, 2008
- Hitachi Via Mechanics, Ltd.
- Yoshitada Oshida
- G02 - OPTICS
Information Patent Grant
Bump forming method and apparatus therefor
- Patent number 6,460,755
- Issue date Oct 8, 2002
- Hitachi, Ltd.
- Kosuke Inoue
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Pattern Formation Method
- Publication number 20090111062
- Publication date Apr 30, 2009
- HITACHI VIA MECHANICS, LTD.
- Masako Kato
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PATTERN EXPOSURE METHOD AND PATTERN EXPOSURE APPARATUS
- Publication number 20080213705
- Publication date Sep 4, 2008
- Hitachi Via Mechanics Ltd.
- Yoshitada Oshida
- G02 - OPTICS
Information Patent Application
Device for Changing Pitch Between Light Beam Axes, and Substrate Ex...
- Publication number 20070279609
- Publication date Dec 6, 2007
- HITACHI VIA MECHANICS, LTD.
- Yoshitada OSHIDA
- G02 - OPTICS
Information Patent Application
Pattern exposure method and apparatus
- Publication number 20060215139
- Publication date Sep 28, 2006
- Hitachi Via Mechanics Ltd.
- Yoshitada Oshida
- G02 - OPTICS
Information Patent Application
Pattern exposure method and pattern exposure apparatus
- Publication number 20050219496
- Publication date Oct 6, 2005
- Hitachi Via Mechanics Ltd.
- Yoshitada Oshida
- G02 - OPTICS