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Tsyr-Shyang Liou
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Taipei, TW
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Patents Grants
last 30 patents
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Patent Grant
Microelectromechanical system (MEMS) device and methods for fabrica...
Patent number
8,129,805
Issue date
Mar 6, 2012
Richwave Technology Corp.
Tsyr-Shyang Liou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICE AND METHODS FOR FABRICA...
Publication number
20110175177
Publication date
Jul 21, 2011
RICHWAVE TECHNOLOGY CORP.
Tsyr-Shyang Liou
B81 - MICRO-STRUCTURAL TECHNOLOGY