Tsz-Sin Siu

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Patents Grantslast 30 patents

Information Patent Grant
Textured membrane for a multi-chamber carrier head
- Patent number 10,702,971
- Issue date Jul 7, 2020
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
Multi-chamber carrier head with a textured membrane
- Patent number 8,454,413
- Issue date Jun 4, 2013
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate removal from polishing tool
- Patent number 7,081,042
- Issue date Jul 25, 2006
- Applied Materials
- Hung Chih Chen
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
TEXTURED MEMBRANE FOR A MULTI-CHAMBER CARRIER HEAD
- Publication number 20170001282
- Publication date Jan 5, 2017
- Applied Materials, Inc.
- Jeonghoon Oh
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Substrate removal from polishing tool
- Publication number 20060019582
- Publication date Jan 26, 2006
- Hung Chih Chen
- B24 - GRINDING POLISHING