Tsz-Sin Siu

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Multi-chamber carrier head with a textured membrane
- Patent number 8,808,062
- Issue date Aug 19, 2014
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
Multiple zone carrier head with flexible membrane
- Patent number 8,088,299
- Issue date Jan 3, 2012
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Multiple zone carrier head with flexible membrane
- Patent number 7,842,158
- Issue date Nov 30, 2010
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Multiple zone carrier head with flexible membrane
- Patent number 7,255,771
- Issue date Aug 14, 2007
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
MULTI-CHAMBER CARRIER HEAD WITH A TEXTURED MEMBRANE
- Publication number 20130334752
- Publication date Dec 19, 2013
- Jeonghoon Oh
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MULTIPLE ZONE CARRIER HEAD WITH FLEXIBLE MEMBRANE
- Publication number 20110070810
- Publication date Mar 24, 2011
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
MULTIPE ZONE CARRIER HEAD WITH FLEXIBLE MEMBRANE
- Publication number 20070272356
- Publication date Nov 29, 2007
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
MULTI-CHAMBER CARRIER HEAD WITH A TEXTURED MEMBRANE
- Publication number 20070202785
- Publication date Aug 30, 2007
- APPLIED MATERIALS, INC.
- Jeonghoon Oh
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Multiple zone carrier head with flexible membrane
- Publication number 20050211377
- Publication date Sep 29, 2005
- APPLIED MATERIALS, INC.
- Hung Chih Chen
- B24 - GRINDING POLISHING