Tuan D. Le

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Porto Alegre, BR

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Patents Grantslast 30 patents

Information Patent Grant
Wafer edge inspection illumination system
- Patent number 9,062,859
- Issue date Jun 23, 2015
- Rudolph Technologies, Inc.
- Christopher Voges
- F21 - LIGHTING
Information Patent Grant
Method of monitoring fabrication processing including edge bead rem...
- Patent number 8,492,178
- Issue date Jul 23, 2013
- Rudolph Technologies, Inc.
- Alan Carlson
- G01 - MEASURING TESTING
Information Patent Grant
Wafer edge inspection
- Patent number 8,426,223
- Issue date Apr 23, 2013
- Rudolph Technologies, Inc.
- Christopher Voges
- F21 - LIGHTING

Patents Applicationslast 30 patents

Information Patent Application
WAFER EDGE INSPECTION
- Publication number 20140063799
- Publication date Mar 6, 2014
- Rudolph Technologies, Inc.
- Christopher Voges
- G01 - MEASURING TESTING
Information Patent Application
WAFER EDGE INSPECTION
- Publication number 20110263049
- Publication date Oct 27, 2011
- Rudolph Technologies, Inc.
- Christopher Voges
- F21 - LIGHTING
Information Patent Application
WAFER FABRICATION MONITORING SYSTEMS AND METHODS, INCLUDING EDGE BE...
- Publication number 20110054659
- Publication date Mar 3, 2011
- Rudolph Technologies, Inc.
- Alan Carlson
- G06 - COMPUTING CALCULATING COUNTING