Tung-Hung FENG

Person

Hsinchu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for coating photo resist over a substrate
- Patent number 12,362,179
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tung-Hung Feng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for applying magnetic field to a filter for reducing metalli...
- Patent number 12,145,087
- Issue date Nov 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsuan-Ying Mai
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method of manufacturing semiconductor devices
- Patent number 12,087,580
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wei Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for coating photo resist over a substrate
- Patent number 11,955,335
- Issue date Apr 9, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tung-Hung Feng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for solvent recycling
- Patent number 11,798,800
- Issue date Oct 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wei Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for applying magnetic field to a filter for reducing metalli...
- Patent number 11,666,838
- Issue date Jun 6, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsuan-Ying Mai
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method and apparatus for coating photo resist over a substrate
- Patent number 11,545,361
- Issue date Jan 3, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tung-Hung Feng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR REDUCING SOLVENT CONSUMPTION
- Publication number 20240382994
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wei LIAO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEVICE FOR APPLYING MAGNETIC FIELD TO A FILTER FOR REDUCING METALLI...
- Publication number 20240375029
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsuan-Ying MAI
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
Information Patent Application
METHOD AND APPARATUS FOR COATING PHOTO RESIST OVER A SUBSTRATE
- Publication number 20240222121
- Publication date Jul 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tung-Hung FENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DE...
- Publication number 20230418156
- Publication date Dec 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hui-Chun LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20230386837
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wei LIAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20230063235
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wei LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SOLVENT RECYCLING
- Publication number 20230043243
- Publication date Feb 9, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wei LIAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR REDUCING SOLVENT CONSUMPTION
- Publication number 20230010749
- Publication date Jan 12, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wei LIAO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD AND APPARATUS FOR SOLVENT RECYCLING
- Publication number 20220415646
- Publication date Dec 29, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wei LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR COATING PHOTO RESIST OVER A SUBSTRATE
- Publication number 20220382158
- Publication date Dec 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tung-Hung FENG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE FOR APPLYING MAGNETIC FIELD TO A FILTER FOR REDUCING METALLI...
- Publication number 20220362693
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsuan-Ying MAI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD AND APPARATUS FOR COATING PHOTO RESIST OVER A SUBSTRATE
- Publication number 20210343521
- Publication date Nov 4, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tung-Hung FENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR APPLYING MAGNETIC FIELD TO A FILTER FOR REDUCING METALLI...
- Publication number 20200129895
- Publication date Apr 30, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsuan-Ying MAI
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...

Tung-Hung FENG

Person

Patents Grantslast 30 patents

Method and apparatus for coating photo resist over a substrate

Device for applying magnetic field to a filter for reducing metalli...

Method of manufacturing semiconductor devices

Method and apparatus for coating photo resist over a substrate

Method and apparatus for solvent recycling

Device for applying magnetic field to a filter for reducing metalli...

Method and apparatus for coating photo resist over a substrate

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR REDUCING SOLVENT CONSUMPTION

DEVICE FOR APPLYING MAGNETIC FIELD TO A FILTER FOR REDUCING METALLI...

METHOD AND APPARATUS FOR COATING PHOTO RESIST OVER A SUBSTRATE

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DE...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES

METHOD AND APPARATUS FOR SOLVENT RECYCLING

METHOD AND APPARATUS FOR REDUCING SOLVENT CONSUMPTION

METHOD AND APPARATUS FOR SOLVENT RECYCLING

METHOD AND APPARATUS FOR COATING PHOTO RESIST OVER A SUBSTRATE

DEVICE FOR APPLYING MAGNETIC FIELD TO A FILTER FOR REDUCING METALLI...

METHOD AND APPARATUS FOR COATING PHOTO RESIST OVER A SUBSTRATE

DEVICE FOR APPLYING MAGNETIC FIELD TO A FILTER FOR REDUCING METALLI...