Tung J. Chuang

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Los Gatos, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Rapid etching method for silicon by SF.sub.6 gas
- Patent number 4,617,086
- Issue date Oct 14, 1986
- International Business Machines Corporation
- Tung J. Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser induced dry chemical etching of metals
- Patent number 4,490,210
- Issue date Dec 25, 1984
- International Business Machines Corporation
- Lee Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Laser induced dry etching of vias in glass with non-contact masking
- Patent number 4,478,677
- Issue date Oct 23, 1984
- International Business Machines Corporation
- Lee Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Etching process with vibrationally excited SF.sub.6
- Patent number 4,331,504
- Issue date May 25, 1982
- International Business Machines Corporation
- Tung J. Chuang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...