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Tuo Wang

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  • Tianjin, CN
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Patents Grantslast 30 patents

  • Information Patent Grant

    Carbon deposition-etch-ash gap fill process
    • Patent number 9,023,731
    • Issue date May 5, 2015
    • Novellus Systems, Inc.
    • Chunhai Ji
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    CARBON DEPOSITION-ETCH-ASH GAP FILL PROCESS
    • Publication number 20140094035
    • Publication date Apr 3, 2014
    • Novellus Systems, Inc.
    • Chunhai Ji
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...