Tuochuan Huang

Person

Saratoga, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Wet cleaning of electrostatic chuck
- Patent number 11,776,822
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Tuochuan Huang
- B08 - CLEANING
Information Patent Grant
Texturizing a surface without bead blasting
- Patent number 10,857,625
- Issue date Dec 8, 2020
- Applied Materials, Inc.
- Gang Peng
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Texturizing a surface without bead blasting
- Patent number 10,434,604
- Issue date Oct 8, 2019
- Applied Materials, Inc.
- Gang Peng
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of wet cleaning aluminum chamber parts
- Patent number 9,387,521
- Issue date Jul 12, 2016
- Lam Research Corporation
- Hong Shih
- B24 - GRINDING POLISHING
Information Patent Grant
Method of removing damaged epoxy from electrostatic chuck
- Patent number 9,105,676
- Issue date Aug 11, 2015
- Lam Research Corporation
- Hong Shih
- B08 - CLEANING
Information Patent Grant
System and method for testing an electrostatic chuck
- Patent number 9,082,805
- Issue date Jul 14, 2015
- Lam Research Corporation
- Hong Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for performing hot water seal on electrostatic chuck
- Patent number 9,054,148
- Issue date Jun 9, 2015
- Lam Research Corporation
- Hong Shih
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Automated bubble detection apparatus and method
- Patent number 8,854,451
- Issue date Oct 7, 2014
- Lam Research Corporation
- Josh Cormier
- G01 - MEASURING TESTING
Information Patent Grant
Method of cleaning aluminum plasma chamber parts
- Patent number 8,545,639
- Issue date Oct 1, 2013
- Lam Research Corporation
- Hong Shih
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
On-line chamber cleaning using dry ice blasting
- Patent number 8,292,698
- Issue date Oct 23, 2012
- Lam Research Corporation
- Hong Shih
- B24 - GRINDING POLISHING
Information Patent Grant
Extending storage time of removed plasma chamber components prior t...
- Patent number 8,216,388
- Issue date Jul 10, 2012
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for testing an electrostatic chuck
- Patent number 8,143,904
- Issue date Mar 27, 2012
- Lam Research Corporation
- Hong Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extending storage time of removed plasma chamber components prior t...
- Patent number 7,976,641
- Issue date Jul 12, 2011
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon electrode assembly surface decontamination by acidic solution
- Patent number 7,507,670
- Issue date Mar 24, 2009
- Lam Research Corporation
- Hong Shih
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Methods for silicon electrode assembly etch rate and etch uniformit...
- Patent number 7,442,114
- Issue date Oct 28, 2008
- Lam Research Corporation
- Tuochuan Huang
- B24 - GRINDING POLISHING
Information Patent Grant
Wet cleaning of electrostatic chucks
- Patent number 7,052,553
- Issue date May 30, 2006
- Lam Research Corporation
- Hong Shih
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR REMOVING DEPOSITS ON THE SURFACE OF A CHAMBER COMPONENT
- Publication number 20240017299
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Tuochuan Huang
- B08 - CLEANING
Information Patent Application
WET CLEANING OF ELECTROSTATIC CHUCK
- Publication number 20210249280
- Publication date Aug 12, 2021
- Applied Materials, Inc.
- Tuochuan HUANG
- B08 - CLEANING
Information Patent Application
TEXTURIZING A SURFACE WITHOUT BEAD BLASTING
- Publication number 20210046587
- Publication date Feb 18, 2021
- Applied Materials, Inc.
- Gang PENG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
TEXTURIZING A SURFACE WITHOUT BEAD BLASTING
- Publication number 20190358746
- Publication date Nov 28, 2019
- Applied Materials, Inc.
- Gang PENG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
INTEGRATED SEMICONDUCTOR PART CLEANING SYSTEM
- Publication number 20190341276
- Publication date Nov 7, 2019
- Applied Materials, Inc.
- Jenn C. CHOW
- B08 - CLEANING
Information Patent Application
LASER POLISHING CERAMIC SURFACES OF PROCESSING COMPONENTS TO BE USE...
- Publication number 20190291214
- Publication date Sep 26, 2019
- Applied Materials, Inc.
- Gang Grant PENG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
TEXTURIZING A SURFACE WITHOUT BEAD BLASTING
- Publication number 20180257172
- Publication date Sep 13, 2018
- Applied Materials, Inc.
- Gang PENG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK
- Publication number 20150235889
- Publication date Aug 20, 2015
- LAM RESEARCH CORPORATION
- Hong Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF WET CLEANING ALUMINUM CHAMBER PARTS
- Publication number 20140150819
- Publication date Jun 5, 2014
- LAM RESEARCH CORPORATION
- Hong Shih
- B08 - CLEANING
Information Patent Application
METHOD OF REMOVING DAMAGED EPOXY FROM ELECTROSTATIC CHUCK
- Publication number 20140083461
- Publication date Mar 27, 2014
- LAM RESEARCH CORPORATION
- Hong Shih
- B08 - CLEANING
Information Patent Application
METHOD OF CLEANING ALUMINUM PLASMA CHAMBER PARTS
- Publication number 20130104930
- Publication date May 2, 2013
- LAM RESEARCH CORPORATION
- Hong Shih
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
AUTOMATED BUBBLE DETECTION APPARATUS AND METHOD
- Publication number 20130100278
- Publication date Apr 25, 2013
- LAM RESEARCH CORPORATION
- Josh Cormier
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK
- Publication number 20130052339
- Publication date Feb 28, 2013
- Hong Shih
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SYSTEM AND METHOD FOR TESTING AN ELECTROSTATIC CHUCK
- Publication number 20120153971
- Publication date Jun 21, 2012
- Hong Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTENDING STORAGE TIME OF REMOVED PLASMA CHAMBER COMPONENTS PRIOR T...
- Publication number 20110232678
- Publication date Sep 29, 2011
- LAM RESEARCH CORPORATION
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR WET CLEANING QUARTZ SURFACES OF COMPONENTS FOR PLASMA P...
- Publication number 20110146909
- Publication date Jun 23, 2011
- LAM RESEARCH CORPORATION
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR TESTING AN ELECTROSTATIC CHUCK
- Publication number 20100090711
- Publication date Apr 15, 2010
- Hong Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for silicon electrode assembly etch rate and etch uniformit...
- Publication number 20060138081
- Publication date Jun 29, 2006
- Lam Research Corporation
- Tuochuan Huang
- B08 - CLEANING
Information Patent Application
Silicon electrode assembly surface decontamination by acidic solution
- Publication number 20060141802
- Publication date Jun 29, 2006
- Lam Research Corporation
- Hong Shih
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
WET CLEANING OF ELECTROSTATIC CHUCKS
- Publication number 20060112969
- Publication date Jun 1, 2006
- Hong Shih
- B08 - CLEANING
Information Patent Application
Methods for wet cleaning quartz surfaces of components for plasma p...
- Publication number 20050274396
- Publication date Dec 15, 2005
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Tuochuan Huang

Person

Patents Grantslast 30 patents

Wet cleaning of electrostatic chuck

Texturizing a surface without bead blasting

Texturizing a surface without bead blasting

Method of wet cleaning aluminum chamber parts

Method of removing damaged epoxy from electrostatic chuck

System and method for testing an electrostatic chuck

Method for performing hot water seal on electrostatic chuck

Automated bubble detection apparatus and method

Method of cleaning aluminum plasma chamber parts

On-line chamber cleaning using dry ice blasting

Extending storage time of removed plasma chamber components prior t...

System and method for testing an electrostatic chuck

Extending storage time of removed plasma chamber components prior t...

Silicon electrode assembly surface decontamination by acidic solution

Methods for silicon electrode assembly etch rate and etch uniformit...

Wet cleaning of electrostatic chucks

Patents Applicationslast 30 patents

METHODS FOR REMOVING DEPOSITS ON THE SURFACE OF A CHAMBER COMPONENT

WET CLEANING OF ELECTROSTATIC CHUCK

TEXTURIZING A SURFACE WITHOUT BEAD BLASTING

TEXTURIZING A SURFACE WITHOUT BEAD BLASTING

INTEGRATED SEMICONDUCTOR PART CLEANING SYSTEM

LASER POLISHING CERAMIC SURFACES OF PROCESSING COMPONENTS TO BE USE...

TEXTURIZING A SURFACE WITHOUT BEAD BLASTING

SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK

METHOD OF WET CLEANING ALUMINUM CHAMBER PARTS

METHOD OF REMOVING DAMAGED EPOXY FROM ELECTROSTATIC CHUCK

METHOD OF CLEANING ALUMINUM PLASMA CHAMBER PARTS

AUTOMATED BUBBLE DETECTION APPARATUS AND METHOD

SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK

SYSTEM AND METHOD FOR TESTING AN ELECTROSTATIC CHUCK

EXTENDING STORAGE TIME OF REMOVED PLASMA CHAMBER COMPONENTS PRIOR T...

METHODS FOR WET CLEANING QUARTZ SURFACES OF COMPONENTS FOR PLASMA P...

SYSTEM AND METHOD FOR TESTING AN ELECTROSTATIC CHUCK

Methods for silicon electrode assembly etch rate and etch uniformit...

Silicon electrode assembly surface decontamination by acidic solution

WET CLEANING OF ELECTROSTATIC CHUCKS

Methods for wet cleaning quartz surfaces of components for plasma p...