Tutomu Hiroki

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for detecting and aligning a substrate
- Patent number 5,636,960
- Issue date Jun 10, 1997
- Tokyo Electron Limited
- Tutomu Hiroki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Multi-chamber system
- Patent number 5,558,482
- Issue date Sep 24, 1996
- Tokyo Electron Limited
- Tutomu Hiroki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Vacuum processing apparatus
- Patent number 5,509,771
- Issue date Apr 23, 1996
- Tokyo Electron Limited
- Tutomu Hiroki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Vacuum processing apparatus
- Patent number 5,306,380
- Issue date Apr 26, 1994
- Tokyo Electron Limited
- Tutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS