Tutomu Ueyama

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Yawata, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for processing a substrate providing an efficient arrange...
- Patent number 6,099,643
- Issue date Aug 8, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Masami Ohtani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 5,963,753
- Issue date Oct 5, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Masami Ohtani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for detection of position with correction of e...
- Patent number 4,751,383
- Issue date Jun 14, 1988
- Dainippon Screen Mfg. Co., Ltd.
- Tutomu Ueyama
- G01 - MEASURING TESTING