Tyler Gloski

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck including declamping electrode and method of de...
- Patent number 9,101,038
- Issue date Aug 4, 2015
- Lam Research Corporation
- Harmeet Singh
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK INCLUDING DECLAMPING ELECTRODE AND METHOD OF DE...
- Publication number 20150181683
- Publication date Jun 25, 2015
- LAM RESEARCH CORPORATION
- Harmeet Singh
- H01 - BASIC ELECTRIC ELEMENTS