Tz-Shian Chen

Person

Hsinchu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Integrated photoresist removal and laser annealing
- Patent number 12,074,026
- Issue date Aug 27, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tz-Shian Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Melting laser anneal of epitaxy regions
- Patent number 11,532,516
- Issue date Dec 20, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Su-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Melting laser anneal of epitaxy regions
- Patent number 10,978,344
- Issue date Apr 13, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Su-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED PHOTORESIST REMOVAL AND LASER ANNEALING
- Publication number 20240379356
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tz-Shian Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED PHOTORESIST REMOVAL AND LASER ANNEALING
- Publication number 20240379355
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tz-Shian Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS, SYSTEM, AND METHOD FOR MEASURING THE TEMPERATURE OF A SU...
- Publication number 20240377263
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tz-Shian CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIN STRUCTURES
- Publication number 20230411168
- Publication date Dec 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Yang Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED PHOTORESIST REMOVAL AND LASER ANNEALING
- Publication number 20230377884
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tz-Shian Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS, SYSTEM, AND METHOD FOR MEASURING THE TEMPERATURE OF A SU...
- Publication number 20230060543
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tz-Shian CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems, Methods, and Semiconductor Devices
- Publication number 20230061802
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tz-Shian Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Melting Laser Anneal of Epitaxy Regions
- Publication number 20210257255
- Publication date Aug 19, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Su-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Melting Laser Anneal Of Epitaxy Regions
- Publication number 20210057276
- Publication date Feb 25, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Su-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS

Tz-Shian Chen

Person

Patents Grantslast 30 patents

Integrated photoresist removal and laser annealing

Melting laser anneal of epitaxy regions

Melting laser anneal of epitaxy regions

Patents Applicationslast 30 patents

INTEGRATED PHOTORESIST REMOVAL AND LASER ANNEALING

INTEGRATED PHOTORESIST REMOVAL AND LASER ANNEALING

APPARATUS, SYSTEM, AND METHOD FOR MEASURING THE TEMPERATURE OF A SU...

FIN STRUCTURES

INTEGRATED PHOTORESIST REMOVAL AND LASER ANNEALING

APPARATUS, SYSTEM, AND METHOD FOR MEASURING THE TEMPERATURE OF A SU...

Systems, Methods, and Semiconductor Devices

Melting Laser Anneal of Epitaxy Regions

Melting Laser Anneal Of Epitaxy Regions