Tzahi Grunzweig

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Timrat, IL

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Patents Grantslast 30 patents

Information Patent Grant
Scatterometry overlay based on reflection peak locations
- Patent number 10,365,230
- Issue date Jul 30, 2019
- KLA-Tencor Corporation
- Eran Amit
- G01 - MEASURING TESTING
Information Patent Grant
Scatterometry system and method for generating non-overlapping and...
- Patent number 10,209,183
- Issue date Feb 19, 2019
- KLA-Tencor Corporation
- Tzahi Grunzweig
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Feed forward of metrology data in a metrology system
- Patent number 9,903,711
- Issue date Feb 27, 2018
- KLA-Tencor Corporation
- Ady Levy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Decreasing inaccuracy due to non-periodic effects on scatterometric...
- Patent number 9,851,300
- Issue date Dec 26, 2017
- KLA-Tencor Corporation
- Barak Bringoltz
- G01 - MEASURING TESTING
Information Patent Grant
Scatterometry system and method for generating non-overlapping and...
- Patent number 9,719,920
- Issue date Aug 1, 2017
- KLA-Tencor Corporation
- Tzahi Grunzweig
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Scatterometry System and Method for Generating Non-Overlapping and...
- Publication number 20180003630
- Publication date Jan 4, 2018
- KLA-Tencor Corporation
- Tzahi Grunzweig
- G01 - MEASURING TESTING
Information Patent Application
Feed Forward of Metrology Data in a Metrology System
- Publication number 20160290796
- Publication date Oct 6, 2016
- KLA-Tencor Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
ILLUMINATION CONFIGURATIONS FOR SCATTEROMETRY MEASUREMENTS
- Publication number 20150022822
- Publication date Jan 22, 2015
- KLA-Tencor Corporation
- Tzahi Grunzweig
- G01 - MEASURING TESTING