Tzu Chin Chuang

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Cupertino, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Sharp scattering angle trap for electron beam apparatus
- Patent number 8,890,066
- Issue date Nov 18, 2014
- KLA-Tencor Corporation
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for measuring a characteristic of a substrate o...
- Patent number 8,765,496
- Issue date Jul 1, 2014
- KLA-Tencor Technologies Corp.
- Mehran Nasser-Ghodsi
- G01 - MEASURING TESTING
Information Patent Grant
Etch selectivity enhancement in electron beam activated chemical etch
- Patent number 7,879,730
- Issue date Feb 1, 2011
- KLA-Tencor Technologies Corporation
- Mehran Naser-Ghodsi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Three-dimensional imaging using electron beam activated chemical etch
- Patent number 7,709,792
- Issue date May 4, 2010
- KLA-Tencor Technologies Corporation
- Mehran Naser-Ghodsi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems configured to reduce distortion of a resist during a metrol...
- Patent number 7,304,302
- Issue date Dec 4, 2007
- KLA-Tencor Technologies Corp.
- Peter Nunan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Methods and Systems for Measuring a Characteristic of a Substrate o...
- Publication number 20140291516
- Publication date Oct 2, 2014
- Mehran Nasser-Ghodsi
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR MEASURING A CHARACTERISTIC OF A SUBSTRATE O...
- Publication number 20080264905
- Publication date Oct 30, 2008
- Mehran Nasser-Ghodsi
- G01 - MEASURING TESTING
Information Patent Application
THREE-DIMENSIONAL IMAGING USING ELECTRON BEAM ACTIVATED CHEMICAL ETCH
- Publication number 20070158562
- Publication date Jul 12, 2007
- KLA-Tencor Technologies Corporation
- MEHRAN NASSER-GHODSI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCH SELECTIVITY ENHANCEMENT IN ELECTRON BEAM ACTIVATED CHEMICAL ETCH
- Publication number 20070158304
- Publication date Jul 12, 2007
- KLA-Tencor Technologies Corporation
- Mehran Nasser-Ghodsi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and systems for measuring a characteristic of a substrate o...
- Publication number 20050221229
- Publication date Oct 6, 2005
- Mehran Nasser-Ghodsi
- G01 - MEASURING TESTING