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Tzu-Chuan Chao
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Tainan City, TW
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Patents Grants
last 30 patents
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Patent Grant
Valve for throttling gas flow from a semiconductor processing tool
Patent number
12,055,228
Issue date
Aug 6, 2024
Taiwan Semiconductor Manufacturing Company Limited
Sheng-Chun Yang
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
Information
Patent Application
HEATING MODULE AND PROGRAM CONTROL METHOD FOR PUMPING LINE OF SEMIC...
Publication number
20240360551
Publication date
Oct 31, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Sheng-chun Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VALVE FOR THROTTLING GAS FLOW FROM A SEMICONDUCTOR PROCESSING TOOL
Publication number
20220403945
Publication date
Dec 22, 2022
Taiwan Semiconductor Manufacturing Company Limited
Sheng-Chun Yang
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...