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Tzu-Chun Tseng
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Changhua City, TW
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Patents Grants
last 30 patents
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Patent Grant
Asymmetric cyclic desposition etch epitaxy
Patent number
8,906,789
Issue date
Dec 9, 2014
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun Hsiung Tsai
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
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Patent Application
Asymmetric Cyclic Desposition Etch Epitaxy
Publication number
20140264348
Publication date
Sep 18, 2014
TAIWAN SEMICONDUCTOR MANUFACTURING CO, LTD.
Chun Hsiung Tsai
C30 - CRYSTAL GROWTH