Tzu-Chun Tseng

Person

  • Changhua City, TW

Patents Grantslast 30 patents

  • Information Patent Grant

    Asymmetric cyclic desposition etch epitaxy

    • Patent number 8,906,789
    • Issue date Dec 9, 2014
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Chun Hsiung Tsai
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents