Tzu-Jung PAN

Person

Hsinchu City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for dynamically controlling temperature of thermo...
- Patent number 12,235,593
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tzu-Jung Pan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV lithography system with 3D sensing and tunning modules
- Patent number 11,852,978
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tai-Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for dynamically controlling temperature of thermo...
- Patent number 11,693,326
- Issue date Jul 4, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tzu-Jung Pan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR DYNAMICALLY CONTROLLING TEMPERATURE OF THERMO...
- Publication number 20250164900
- Publication date May 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tzu-Jung Pan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV Lithography System With 3D Sensing and Tunning Modules
- Publication number 20240103378
- Publication date Mar 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tai-Yu CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR DETECTING DEBRIS IN A PHOTOLITHOGRAPHY SYSTEM
- Publication number 20230375944
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shang-Chieh CHIEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR DYNAMICALLY CONTROLLING TEMPERATURE OF THERMO...
- Publication number 20230288819
- Publication date Sep 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tzu-Jung Pan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV LITHOGRAPHY SYSTEM WITH 3D SENSING AND TUNNING MODULES
- Publication number 20230280657
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tai-Yu CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHOD OF USING THE SAME
- Publication number 20220404722
- Publication date Dec 22, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Tzu-Jung PAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tzu-Jung PAN

Person

Patents Grantslast 30 patents

System and method for dynamically controlling temperature of thermo...

EUV lithography system with 3D sensing and tunning modules

System and method for dynamically controlling temperature of thermo...

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR DYNAMICALLY CONTROLLING TEMPERATURE OF THERMO...

EUV Lithography System With 3D Sensing and Tunning Modules

SYSTEM AND METHOD FOR DETECTING DEBRIS IN A PHOTOLITHOGRAPHY SYSTEM

SYSTEM AND METHOD FOR DYNAMICALLY CONTROLLING TEMPERATURE OF THERMO...

EUV LITHOGRAPHY SYSTEM WITH 3D SENSING AND TUNNING MODULES

SEMICONDUCTOR PROCESSING TOOL AND METHOD OF USING THE SAME