Tzu-Ting Chou

Follow

Person

Hsin-Chu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for localized EUV pellicle glue removal
- Patent number 11,079,669
- Issue date Aug 3, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tzu-Ting Chou
- B08 - CLEANING
Information Patent Grant
System and method for localized EUV pellicle glue removal
- Patent number 10,520,805
- Issue date Dec 31, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tzu-Ting Chou
- B08 - CLEANING
Information Patent Grant
Mask pellicle indicator for haze prevention
- Patent number 9,658,526
- Issue date May 23, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuan-Wen Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
System and Method for Localized EUV Pellicle Glue Removal
- Publication number 20200150523
- Publication date May 14, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Tzu-Ting Chou
- B08 - CLEANING
Information Patent Application
System and Method for Localized EUV Pellicle Glue Removal
- Publication number 20180031962
- Publication date Feb 1, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- Tzu-Ting Chou
- B08 - CLEANING
Information Patent Application
Mask Pellicle Indicator for Haze Prevention
- Publication number 20170003585
- Publication date Jan 5, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuan-Wen Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY