Tzu-Yu Liu

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Resistivity-based adjustment of measurements from in-situ monitoring
- Patent number 11,199,605
- Issue date Dec 14, 2021
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Resistivity-based calibration of in-situ electromagnetic inductive...
- Patent number 11,079,459
- Issue date Aug 3, 2021
- Applied Materials, Inc.
- Kun Xu
- G01 - MEASURING TESTING
Information Patent Grant
Core configuration with alternating posts for in-situ electromagnet...
- Patent number 11,004,708
- Issue date May 11, 2021
- Applied Materials, Inc.
- Hassan G. Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Real time profile control for chemical mechanical polishing
- Patent number 10,562,148
- Issue date Feb 18, 2020
- Applied Materials, Inc.
- Shih-Haur Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Determination of gain for eddy current sensor
- Patent number 10,556,315
- Issue date Feb 11, 2020
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Endpoint detection with compensation for filtering
- Patent number 10,427,272
- Issue date Oct 1, 2019
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Determination of gain for eddy current sensor
- Patent number 10,207,386
- Issue date Feb 19, 2019
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Adjusting eddy current measurements
- Patent number 9,636,797
- Issue date May 2, 2017
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Feedback control using detection of clearance and adjustment for un...
- Patent number 9,472,475
- Issue date Oct 18, 2016
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Determination of gain for eddy current sensor
- Patent number 9,281,253
- Issue date Mar 8, 2016
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Determination of gain for eddy current sensor
- Patent number 9,275,917
- Issue date Mar 1, 2016
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
In-situ monitoring system with monitoring of elongated region
- Patent number 9,205,527
- Issue date Dec 8, 2015
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
RESISTIVITY-BASED ADJUSTMENT OF THRESHOLDS FOR IN-SITU MONITORING
- Publication number 20220043095
- Publication date Feb 10, 2022
- Applied Materials, Inc.
- Kun Xu
- G01 - MEASURING TESTING
Information Patent Application
DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR
- Publication number 20190134775
- Publication date May 9, 2019
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
RESISTIVITY-BASED ADJUSTMENT OF MEASUREMENTS FROM IN-SITU MONITORING
- Publication number 20180203089
- Publication date Jul 19, 2018
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
RESISTIVITY-BASED CALIBRATION OF IN-SITU ELECTROMAGNETIC INDUCTIVE...
- Publication number 20180203090
- Publication date Jul 19, 2018
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
CORE CONFIGURATION WITH ALTERNATING POSTS FOR IN-SITU ELECTROMAGNET...
- Publication number 20180122667
- Publication date May 3, 2018
- Applied Materials, Inc.
- Hassan G. Iravani
- G01 - MEASURING TESTING
Information Patent Application
REAL TIME PROFILE CONTROL FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20180099374
- Publication date Apr 12, 2018
- Shih-Haur Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Endpoint Detection With Compensation for Filtering
- Publication number 20180079052
- Publication date Mar 22, 2018
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR
- Publication number 20160158908
- Publication date Jun 9, 2016
- Applied Materials, Inc.
- Kun Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTING EDDY CURRENT MEASUREMENTS
- Publication number 20150224623
- Publication date Aug 13, 2015
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR
- Publication number 20150118766
- Publication date Apr 30, 2015
- Applied Materials, Inc.
- Kun Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR
- Publication number 20150118765
- Publication date Apr 30, 2015
- Applied Materials, Inc.
- Kun Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU MONITORING SYSTEM WITH MONITORING OF ELONGATED REGION
- Publication number 20140127971
- Publication date May 8, 2014
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
Feedback Control Using Detection Of Clearance And Adjustment For Un...
- Publication number 20130224890
- Publication date Aug 29, 2013
- Kun Xu
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Resistivity-based adjustment of measurements from in-situ monitoring

Resistivity-based calibration of in-situ electromagnetic inductive...

Core configuration with alternating posts for in-situ electromagnet...

Real time profile control for chemical mechanical polishing

Determination of gain for eddy current sensor

Endpoint detection with compensation for filtering

Determination of gain for eddy current sensor

Adjusting eddy current measurements

Feedback control using detection of clearance and adjustment for un...

Determination of gain for eddy current sensor

Determination of gain for eddy current sensor

In-situ monitoring system with monitoring of elongated region

Patents Applicationslast 30 patents

RESISTIVITY-BASED ADJUSTMENT OF THRESHOLDS FOR IN-SITU MONITORING

DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR

RESISTIVITY-BASED ADJUSTMENT OF MEASUREMENTS FROM IN-SITU MONITORING

RESISTIVITY-BASED CALIBRATION OF IN-SITU ELECTROMAGNETIC INDUCTIVE...

CORE CONFIGURATION WITH ALTERNATING POSTS FOR IN-SITU ELECTROMAGNET...

REAL TIME PROFILE CONTROL FOR CHEMICAL MECHANICAL POLISHING

Endpoint Detection With Compensation for Filtering

DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR

ADJUSTING EDDY CURRENT MEASUREMENTS

DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR

DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR

IN-SITU MONITORING SYSTEM WITH MONITORING OF ELONGATED REGION

Feedback Control Using Detection Of Clearance And Adjustment For Un...