Tzung-Chi Fu

Person

Miaoli City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
EUV light source and apparatus for lithography
- Patent number 12,167,525
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shang-Chieh Chien
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lithography system and method
- Patent number 12,124,178
- Issue date Oct 22, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hao-Yu Lan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for cleaning an EUV mask
- Patent number 12,099,310
- Issue date Sep 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Hui Li
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of lithography process and transferring a reticle
- Patent number 11,982,944
- Issue date May 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Lun Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Particle removal method
- Patent number 11,984,314
- Issue date May 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Siao-Chian Huang
- B08 - CLEANING
Information Patent Grant
Methods and systems for aligning master oscillator power amplifier...
- Patent number 11,973,302
- Issue date Apr 30, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lin Louis Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EUV light source and apparatus for lithography
- Patent number 11,832,372
- Issue date Nov 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shang-Chieh Chien
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Residual gain monitoring and reduction for EUV drive laser
- Patent number 11,737,200
- Issue date Aug 22, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lin Louis Chang
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
EUV radiation generation methods and systems
- Patent number 11,723,141
- Issue date Aug 8, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lin Louis Chang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of lithography process using reticle container with discharg...
- Patent number 11,703,763
- Issue date Jul 18, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Lun Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light source, EUV lithography system, and method for performing cir...
- Patent number 11,703,769
- Issue date Jul 18, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi Yang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method of discharging an EUV mask
- Patent number 11,698,591
- Issue date Jul 11, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Zhen Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for cleaning an EUV mask
- Patent number 11,681,235
- Issue date Jun 20, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Hui Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask for attracting charged particles and method for using the same
- Patent number 11,681,234
- Issue date Jun 20, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-An Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography system and method
- Patent number 11,675,280
- Issue date Jun 13, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hao-Yu Lan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and systems for aligning master oscillator power amplifier...
- Patent number 11,588,293
- Issue date Feb 21, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lin Louis Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EUV lithography system and method for decreasing debris in EUV lith...
- Patent number 11,531,278
- Issue date Dec 20, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi Yang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Light source for lithography exposure process
- Patent number 11,483,918
- Issue date Oct 25, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chieh Hsieh
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV radiation modification methods and systems
- Patent number 11,419,203
- Issue date Aug 16, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lin Louis Chang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Light source, EUV lithography system, and method for generating EUV...
- Patent number 11,333,983
- Issue date May 17, 2022
- TAIWAN SEMICONDUCTOR MANFACTURING COMPANY, LTD.
- Chi Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle with conductive material structure
- Patent number 11,320,733
- Issue date May 3, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Lun Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV light source and apparatus for lithography
- Patent number 11,272,606
- Issue date Mar 8, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shang-Chieh Chien
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for extreme ultraviolet source control
- Patent number 11,224,115
- Issue date Jan 11, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Chia Hsu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV collector contamination prevention
- Patent number 11,219,115
- Issue date Jan 4, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Fa Wu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for lithography in semiconductor fabrication
- Patent number 11,121,018
- Issue date Sep 14, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chueh-Chi Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography system and method
- Patent number 11,106,146
- Issue date Aug 31, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hao-Yu Lan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV vessel inspection method and related system
- Patent number 11,092,555
- Issue date Aug 17, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lin Louis Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle removal apparatus, particle removal system and particle re...
- Patent number 11,062,898
- Issue date Jul 13, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Siao-Chian Huang
- B08 - CLEANING
Information Patent Grant
Light source for lithography exposure process
- Patent number 10,993,308
- Issue date Apr 27, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chieh Hsieh
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Residual gain monitoring and reduction for EUV drive laser
- Patent number 10,980,100
- Issue date Apr 13, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lin Louis Chang
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR CLEANING AN EUV MASK
- Publication number 20240377766
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Hui LI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS AND SYSTEMS FOR ALIGNING MASTER OSCILLATOR POWER AMPLIFIER...
- Publication number 20240297476
- Publication date Sep 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lin Louis Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE REMOVAL APPARATUS
- Publication number 20240258095
- Publication date Aug 1, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Siao-Chian HUANG
- B08 - CLEANING
Information Patent Application
EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY
- Publication number 20230389168
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shang-Chieh CHIEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PERFORMING LITHOGRAPHY PROCESS, LIGHT SOURCE, AND EUV LI...
- Publication number 20230324813
- Publication date Oct 12, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi YANG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF LITHOGRAPHY PROCESS AND TRANSFERRING A RETICLE
- Publication number 20230305404
- Publication date Sep 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Lun CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR CLEANING AN EUV MASK
- Publication number 20230280666
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Hui LI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHY SYSTEM AND METHOD
- Publication number 20230266682
- Publication date Aug 24, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hao-Yu LAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND SYSTEMS FOR ALIGNING MASTER OSCILLATOR POWER AMPLIFIER...
- Publication number 20230208092
- Publication date Jun 29, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lin Louis Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD OF DISCHARGING AN EUV MASK
- Publication number 20230060598
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Zhen CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE CARRIER AND ASSOCIATED METHODS
- Publication number 20230062852
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Hsun CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EUV RADIATION GENERATION METHODS AND SYSTEMS
- Publication number 20220386440
- Publication date Dec 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lin Louis CHANG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MASK FOR ATTRACTING CHARGED PARTICLES AND METHOD FOR USING THE SAME
- Publication number 20220382173
- Publication date Dec 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-An CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR CLEANING AN EUV MASK WITHIN A SCANNER
- Publication number 20220299882
- Publication date Sep 22, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yuru Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR CLEANING AN EUV MASK
- Publication number 20220283521
- Publication date Sep 8, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Hui LI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT SOURCE, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR PERFORMING CIR...
- Publication number 20220276574
- Publication date Sep 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi YANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF LITHOGRAPHY PROCESS USING RETICLE CONTAINER WITH DISCHARG...
- Publication number 20220260901
- Publication date Aug 18, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Lun CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY
- Publication number 20220191999
- Publication date Jun 16, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shang-Chieh CHIEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY SYSTEM AND METHOD
- Publication number 20210389685
- Publication date Dec 16, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hao-Yu LAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PARTICLE REMOVAL METHOD
- Publication number 20210335597
- Publication date Oct 28, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Siao-Chian HUANG
- B08 - CLEANING
Information Patent Application
LIGHT SOURCE FOR LITHOGRAPHY EXPOSURE PROCESS
- Publication number 20210243875
- Publication date Aug 5, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chieh HSIEH
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Residual gain monitoring and reduction for EUV drive laser
- Publication number 20210235572
- Publication date Jul 29, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Lin Louis Chang
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EUV LITHOGRAPHY SYSTEM AND METHOD FOR DECREASING DEBRIS IN EUV LITH...
- Publication number 20210223708
- Publication date Jul 22, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi YANG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV RADIATION MODIFICATION METHODS AND SYSTEMS
- Publication number 20210168923
- Publication date Jun 3, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lin Louis CHANG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
System and Method for Extreme Ultraviolet Source Control
- Publication number 20210068241
- Publication date Mar 4, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Chia Hsu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT SOURCE, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR GENERATING EUV...
- Publication number 20210055664
- Publication date Feb 25, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi YANG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
RETICLE WITH CONDUCTIVE MATERIAL STRUCTURE
- Publication number 20210026236
- Publication date Jan 28, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Lun CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RADIATION SOURCE APPARATUS AND METHOD FOR DECREASING DEBRIS IN RADI...
- Publication number 20200348607
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi YANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV VESSEL INSPECTION METHOD AND RELATED SYSTEM
- Publication number 20200348241
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lin Louis CHANG
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION
- Publication number 20200350194
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chueh-Chi KUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tzung-Chi Fu

Person

Patents Grantslast 30 patents

EUV light source and apparatus for lithography

Lithography system and method

System and method for cleaning an EUV mask

Method of lithography process and transferring a reticle

Particle removal method

Methods and systems for aligning master oscillator power amplifier...

EUV light source and apparatus for lithography

Residual gain monitoring and reduction for EUV drive laser

EUV radiation generation methods and systems

Method of lithography process using reticle container with discharg...

Light source, EUV lithography system, and method for performing cir...

System and method of discharging an EUV mask

System and method for cleaning an EUV mask

Mask for attracting charged particles and method for using the same

Lithography system and method

Methods and systems for aligning master oscillator power amplifier...

EUV lithography system and method for decreasing debris in EUV lith...

Light source for lithography exposure process

EUV radiation modification methods and systems

Light source, EUV lithography system, and method for generating EUV...

Reticle with conductive material structure

EUV light source and apparatus for lithography

System and method for extreme ultraviolet source control

EUV collector contamination prevention

Method and apparatus for lithography in semiconductor fabrication

Lithography system and method

EUV vessel inspection method and related system

Particle removal apparatus, particle removal system and particle re...

Light source for lithography exposure process

Residual gain monitoring and reduction for EUV drive laser

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR CLEANING AN EUV MASK

METHODS AND SYSTEMS FOR ALIGNING MASTER OSCILLATOR POWER AMPLIFIER...

PARTICLE REMOVAL APPARATUS

EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY

METHOD FOR PERFORMING LITHOGRAPHY PROCESS, LIGHT SOURCE, AND EUV LI...

METHOD OF LITHOGRAPHY PROCESS AND TRANSFERRING A RETICLE

SYSTEM AND METHOD FOR CLEANING AN EUV MASK

LITHOGRAPHY SYSTEM AND METHOD

METHODS AND SYSTEMS FOR ALIGNING MASTER OSCILLATOR POWER AMPLIFIER...

SYSTEM AND METHOD OF DISCHARGING AN EUV MASK

RETICLE CARRIER AND ASSOCIATED METHODS

EUV RADIATION GENERATION METHODS AND SYSTEMS

MASK FOR ATTRACTING CHARGED PARTICLES AND METHOD FOR USING THE SAME

SYSTEM AND METHOD FOR CLEANING AN EUV MASK WITHIN A SCANNER

SYSTEM AND METHOD FOR CLEANING AN EUV MASK

LIGHT SOURCE, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR PERFORMING CIR...

METHOD OF LITHOGRAPHY PROCESS USING RETICLE CONTAINER WITH DISCHARG...

EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY

LITHOGRAPHY SYSTEM AND METHOD

PARTICLE REMOVAL METHOD

LIGHT SOURCE FOR LITHOGRAPHY EXPOSURE PROCESS

Residual gain monitoring and reduction for EUV drive laser

EUV LITHOGRAPHY SYSTEM AND METHOD FOR DECREASING DEBRIS IN EUV LITH...

EUV RADIATION MODIFICATION METHODS AND SYSTEMS

System and Method for Extreme Ultraviolet Source Control

LIGHT SOURCE, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR GENERATING EUV...

RETICLE WITH CONDUCTIVE MATERIAL STRUCTURE

RADIATION SOURCE APPARATUS AND METHOD FOR DECREASING DEBRIS IN RADI...

EUV VESSEL INSPECTION METHOD AND RELATED SYSTEM

METHOD AND APPARATUS FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION