Tzung-Shiun LIU

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Tainan City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic mask, a pellicle therein and method of forming the same
- Patent number 11,226,551
- Issue date Jan 18, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ching-Yueh Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for developing a photoresist coated substrate
- Patent number 10,969,682
- Issue date Apr 6, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tzung-Shiun Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic mask, a pellicle therein and method of forming the same
- Patent number 10,802,395
- Issue date Oct 13, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ching-Yueh Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for developing a photoresist coated substrate
- Patent number 10,698,313
- Issue date Jun 30, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tzung-Shiun Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
PSM blank for enhancing small size CD resolution
- Patent number 9,829,786
- Issue date Nov 28, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lang Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC MASK, A PELLICLE THEREIN AND METHOD OF FORMING THE SAME
- Publication number 20210033964
- Publication date Feb 4, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- CHING-YUEH CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR DEVELOPING A PHOTORESIST COATED SUBSTRATE
- Publication number 20200326622
- Publication date Oct 15, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tzung-Shiun LIU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC MASK, A PELLICLE THEREIN AND METHOD OF FORMING THE SAME
- Publication number 20200089102
- Publication date Mar 19, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- CHING-YUEH CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR DEVELOPING A PHOTORESIST COATED SUBSTRATE
- Publication number 20190155151
- Publication date May 23, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tzung-Shiun LIU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PSM BLANK FOR ENHANCING SMALL SIZE CD RESOLUTION
- Publication number 20160377974
- Publication date Dec 29, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lang CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY