Tzung-Shiun LU

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Tainan City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Moveable and adjustable gas injectors for an etching chamber
- Patent number 10,157,805
- Issue date Dec 18, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tzung-Shiun Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Moveable and adjustable gas injectors for an etching chamber
- Patent number 9,373,551
- Issue date Jun 21, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tzung-Shiun Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MOVEABLE AND ADJUSTABLE GAS INJECTORS FOR AN ETCHING CHAMBER
- Publication number 20160284616
- Publication date Sep 29, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Tzung-Shiun LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVEABLE AND ADJUSTABLE GAS INJECTORS FOR AN ETCHING CHAMBER
- Publication number 20140273301
- Publication date Sep 18, 2014
- Taiwan Semiconductor Manufacturing Co., LTD
- Tzung-Shiun LU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...