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Taipei City, TW
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last 30 patents
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Patent Application
H20 PLASMA AND H20 VAPOR METHODS FOR RELEASING CHARGES
Publication number
20060199393
Publication date
Sep 7, 2006
Taiwan Semiconductor Manufacturing Co., LTD
Yuan-Bang Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
H2O plasma for simultaneous resist removal and charge releasing
Publication number
20050287814
Publication date
Dec 29, 2005
Taiwan Semiconductor Manufacturing Co., Ltd.
Yuan-Bang Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY