Ulf-Carsten Kirschstein

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Jenapriessnitz, DE

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Patents Grantslast 30 patents

Information Patent Grant
Aerostatic bearing arrangement and associated electrostatic preload...
- Patent number 8,529,130
- Issue date Sep 10, 2013
- Vistec Electron Beam GmbH
- Gerhard Schubert
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Aerostatically guided table system for vacuum application
- Patent number 8,496,221
- Issue date Jul 30, 2013
- Vistec Electron Beam GmbH
- Gerhard Schubert
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Table guided by aerostatic bearing elements for vacuum application
- Patent number 8,267,582
- Issue date Sep 18, 2012
- Vistec Electron Beam GmbH
- Gerhard Schubert
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Six-axis positioning system having a zero-magnetic-field space
- Patent number 6,639,225
- Issue date Oct 28, 2003
- Leica Microsystems Lithography GmbH
- Ulf-Carsten Kirschstein
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for receiving and retaining a substrate
- Patent number 6,480,369
- Issue date Nov 12, 2002
- Leica Microststems Lithography GmbH
- Ulf-Carsten Kirschstein
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Holding device for a substrate
- Patent number 6,426,860
- Issue date Jul 30, 2002
- Leica Microsystems Lithography GmbH
- Gerhard Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Aerostatically Guided Table System for Vacuum Application
- Publication number 20100122603
- Publication date May 20, 2010
- VISTEC ELECTRON BEAM GMBH
- Gerhard Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
AEROSTATIC BEARING ARRANGEMENT AND ASSOCIATED ELECTROSTATIC PRELOAD...
- Publication number 20100061667
- Publication date Mar 11, 2010
- VISTEC ELECTRON BEAM GMBH
- Gerhard Schubert
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
TABLE GUIDED BY AEROSTATIC BEARING ELEMENTS FOR VACUUM APPLICATION
- Publication number 20090255447
- Publication date Oct 15, 2009
- VISTEC ELECTRON BEAM GMBH
- Gerhard Schubert
- B82 - NANO-TECHNOLOGY
Information Patent Application
Six-axis positioning system having a zero-magnetic-field space
- Publication number 20020079461
- Publication date Jun 27, 2002
- Ulf-Carsten Kirschstein
- H01 - BASIC ELECTRIC ELEMENTS