Ulrich Bingel

Person

Michelfeld, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for producing a reflective optical element, reflective optic...
- Patent number 11,372,334
- Issue date Jun 28, 2022
- Carl Zeiss SMT GmbH
- Markus Bauer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method for producing a reflective optical element, reflective optic...
- Patent number 10,534,269
- Issue date Jan 14, 2020
- Carl Zeiss SMT GmbH
- Markus Bauer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method for producing a reflective optical element, reflective optic...
- Patent number 10,481,501
- Issue date Nov 19, 2019
- Carl Zeiss SMT GmbH
- Markus Bauer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Optical element unit for exposure processes
- Patent number 10,203,607
- Issue date Feb 12, 2019
- Carl Zeiss SMT GmbH
- Tilman Schwertner
- G02 - OPTICS
Information Patent Grant
Method and device for connecting an optical element to a frame
- Patent number 9,604,299
- Issue date Mar 28, 2017
- Carl Zeiss SMT GmbH
- Armin Schoeppach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV microlithography illumination optical system and EUV attenuator...
- Patent number 9,482,959
- Issue date Nov 1, 2016
- Carl Zeiss SMT GmbH
- Nicolas Schmidts
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical element unit for exposure processes having sealing element
- Patent number 9,046,795
- Issue date Jun 2, 2015
- Carl Zeiss SMT GmbH
- Tilman Schwertner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for connecting an optical element to a frame
- Patent number 8,705,006
- Issue date Apr 22, 2014
- Carl Zeiss SMT GmbH
- Armin Schoeppach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical module with minimized overrun of the optical element
- Patent number 8,441,747
- Issue date May 14, 2013
- Carl Zeiss SMT GmbH
- Willi Heintel
- G02 - OPTICS
Information Patent Grant
Optical component having an improved transient thermal behavior and...
- Patent number 7,965,456
- Issue date Jun 21, 2011
- Carl Zeiss SMT GmbH
- Wilhelm Egle
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Optical component having an improved transient thermal behavior and...
- Patent number 7,483,223
- Issue date Jan 27, 2009
- Carl Zeiss SMT AG
- Wilhelm Egle
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method of connecting a multiplicity of optical elements to a basic...
- Patent number 7,034,998
- Issue date Apr 25, 2006
- Carl Zeiss SMT AG
- Frank Melzer
- G02 - OPTICS
Information Patent Grant
Optical beam guidance system and method for preventing contaminatio...
- Patent number 6,824,277
- Issue date Nov 30, 2004
- Carl Zeiss SMT AG
- Ansgar Freitag
- G02 - OPTICS
Information Patent Grant
Galvanoplastic optical mounting
- Patent number 6,503,383
- Issue date Jan 7, 2003
- Carl-Zeiss-Stiftung
- Hubert Holderer
- G02 - OPTICS
Information Patent Grant
Galvanoplastic optical mounting
- Patent number 6,166,868
- Issue date Dec 26, 2000
- Carl Zeiss Stiftung
- Hubert Holderer
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT, REFLECTIVE OPTIC...
- Publication number 20200096874
- Publication date Mar 26, 2020
- Carl Zeiss SMT GMBH
- Markus Bauer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT, REFLECTIVE OPTIC...
- Publication number 20170315453
- Publication date Nov 2, 2017
- Carl Zeiss SMT GMBH
- Markus Bauer
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT UNIT FOR EXPOSURE PROCESSES
- Publication number 20150168846
- Publication date Jun 18, 2015
- Carl Zeiss SMT GMBH
- Tilman Schwertner
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR CONNECTING AN OPTICAL ELEMENT TO A FRAME
- Publication number 20150008215
- Publication date Jan 8, 2015
- Carl Zeiss SMT GMBH
- Armin Schoeppach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV MICROLITHOGRAPHY ILLUMINATION OPTICAL SYSTEM AND EUV ATTENUATOR...
- Publication number 20120069313
- Publication date Mar 22, 2012
- Carl Zeiss SMT GMBH
- Nicolas Schmidts
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL COMPONENT HAVING AN IMPROVED TRANSIENT THERMAL BEHAVIOR AND...
- Publication number 20110211180
- Publication date Sep 1, 2011
- Carl Zeiss SMT GMBH
- Wilhelm Egle
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING AN OPTICAL ELEMENT THROUGH A MOLDING PROCESS,...
- Publication number 20100182710
- Publication date Jul 22, 2010
- Carl Zeiss SMT AG
- Udo DINGER
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND DEVICE FOR CONNECTING AN OPTICAL ELEMENT TO A FRAME
- Publication number 20090244508
- Publication date Oct 1, 2009
- Carl Zeiss SMT AG
- Armin Schoeppach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Optical Component Having an Improved Transient Thermal Behavior and...
- Publication number 20090021950
- Publication date Jan 22, 2009
- Wilhelm Egle
- B82 - NANO-TECHNOLOGY
Information Patent Application
OPTICAL ELEMENT UNIT FOR EXPOSURE PROCESSES
- Publication number 20080225247
- Publication date Sep 18, 2008
- Carl Zeiss SMT AG
- Tilman Schwertner
- G02 - OPTICS
Information Patent Application
Optical module with minimized overrun of the optical element
- Publication number 20080204689
- Publication date Aug 28, 2008
- Carl Zeiss SMT AG
- Willi Heintel
- G02 - OPTICS
Information Patent Application
Device for Controlling the Temperature of Elements
- Publication number 20070252959
- Publication date Nov 1, 2007
- Tilmann Schwertner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical component having an improved transient thermal behavior and...
- Publication number 20060093253
- Publication date May 4, 2006
- Wilhelm Egle
- B82 - NANO-TECHNOLOGY
Information Patent Application
Optical beam guidance system and method for preventing contaminatio...
- Publication number 20020145808
- Publication date Oct 10, 2002
- CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
- Ansgar Freitag
- G02 - OPTICS
Information Patent Application
Method of connecting a multiplicity of optical elements to a basic...
- Publication number 20020021507
- Publication date Feb 21, 2002
- Frank Melzer
- G02 - OPTICS

Ulrich Bingel

Person

Patents Grantslast 30 patents

Method for producing a reflective optical element, reflective optic...

Method for producing a reflective optical element, reflective optic...

Method for producing a reflective optical element, reflective optic...

Optical element unit for exposure processes

Method and device for connecting an optical element to a frame

EUV microlithography illumination optical system and EUV attenuator...

Optical element unit for exposure processes having sealing element

Method and device for connecting an optical element to a frame

Optical module with minimized overrun of the optical element

Optical component having an improved transient thermal behavior and...

Optical component having an improved transient thermal behavior and...

Method of connecting a multiplicity of optical elements to a basic...

Optical beam guidance system and method for preventing contaminatio...

Galvanoplastic optical mounting

Galvanoplastic optical mounting

Patents Applicationslast 30 patents

METHOD FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT, REFLECTIVE OPTIC...

METHOD FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT, REFLECTIVE OPTIC...

OPTICAL ELEMENT UNIT FOR EXPOSURE PROCESSES

METHOD AND DEVICE FOR CONNECTING AN OPTICAL ELEMENT TO A FRAME

EUV MICROLITHOGRAPHY ILLUMINATION OPTICAL SYSTEM AND EUV ATTENUATOR...

OPTICAL COMPONENT HAVING AN IMPROVED TRANSIENT THERMAL BEHAVIOR AND...

METHOD FOR PRODUCING AN OPTICAL ELEMENT THROUGH A MOLDING PROCESS,...

METHOD AND DEVICE FOR CONNECTING AN OPTICAL ELEMENT TO A FRAME

Optical Component Having an Improved Transient Thermal Behavior and...

OPTICAL ELEMENT UNIT FOR EXPOSURE PROCESSES

Optical module with minimized overrun of the optical element

Device for Controlling the Temperature of Elements

Optical component having an improved transient thermal behavior and...

Optical beam guidance system and method for preventing contaminatio...

Method of connecting a multiplicity of optical elements to a basic...