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Ulrich Ku/ nzel
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Kusterdingen, DE
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last 30 patents
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Patent Grant
Plasma reactor for etching and coating substrates
Patent number
4,461,237
Issue date
Jul 24, 1984
International Business Machines Corporation
Holger Hinkel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Reactor for reactive ion etching and etching method
Patent number
4,424,102
Issue date
Jan 3, 1984
International Business Machines Corporation
Christine Brandeis
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...