Ulrich Ku/ nzel

Person

  • Kusterdingen, DE

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma reactor for etching and coating substrates

    • Patent number 4,461,237
    • Issue date Jul 24, 1984
    • International Business Machines Corporation
    • Holger Hinkel
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Reactor for reactive ion etching and etching method

    • Patent number 4,424,102
    • Issue date Jan 3, 1984
    • International Business Machines Corporation
    • Christine Brandeis
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...