Ulrich Mantz

Person

Schelkingen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Inspection system and inspection method to qualify semiconductor st...
- Patent number 11,378,532
- Issue date Jul 5, 2022
- Carl Zeiss SMT GmbH
- Brett Lewis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for characterizing a wafer patterned using at lea...
- Patent number 10,509,330
- Issue date Dec 17, 2019
- Carl Zeiss SMT GmbH
- Hans-Michael Stiepan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Ion sources, systems and methods
- Patent number 9,236,225
- Issue date Jan 12, 2016
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Ion sources, systems and methods
- Patent number 9,012,867
- Issue date Apr 21, 2015
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Ion sources, systems and methods
- Patent number 8,748,845
- Issue date Jun 10, 2014
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam source and method of manufacturing the same
- Patent number 8,723,138
- Issue date May 13, 2014
- Carl Zeiss Microscopy GmbH
- Volker Drexel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cross-section systems and methods
- Patent number 8,384,029
- Issue date Feb 26, 2013
- Carl Zeiss NTS, LLC
- Rainer Knippelmeyer
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam source and method of manufacturing the same
- Patent number 8,164,071
- Issue date Apr 24, 2012
- Carl Zeiss NTS GmbH
- Volker Drexel
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Ion sources, systems and methods
- Patent number 8,110,814
- Issue date Feb 7, 2012
- ALIS Corporation
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,518,122
- Issue date Apr 14, 2009
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,485,873
- Issue date Feb 3, 2009
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INSPECTION SYSTEM AND INSPECTION METHOD TO QUALIFY SEMICONDUCTOR ST...
- Publication number 20210109046
- Publication date Apr 15, 2021
- Carl Zeiss SMT GMBH
- Brett Lewis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR CHARACTERIZING A WAFER PATTERNED USING AT LEA...
- Publication number 20180203369
- Publication date Jul 19, 2018
- Carl Zeiss SMT GMBH
- Hans-Michael Stiepan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20150213997
- Publication date Jul 30, 2015
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20140306121
- Publication date Oct 16, 2014
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20120141693
- Publication date Jun 7, 2012
- ALIS Corporation
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
ELECTRON BEAM SOURCE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20120131785
- Publication date May 31, 2012
- NANOTOOLS GMBH
- Volker Drexel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CROSS-SECTION SYSTEMS AND METHODS
- Publication number 20120085906
- Publication date Apr 12, 2012
- CARL ZEISS NTS, LLC.
- Rainer Knippelmeyer
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM SOURCE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20100078557
- Publication date Apr 1, 2010
- CARL ZEISS NTS GMBH
- Volker Drexel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20090179161
- Publication date Jul 16, 2009
- ALIS Corporation
- BILLY W. WARD
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion sources, systems and methods
- Publication number 20070194251
- Publication date Aug 23, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion sources, systems and methods
- Publication number 20070187621
- Publication date Aug 16, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY

Ulrich Mantz

Person

Patents Grantslast 30 patents

Inspection system and inspection method to qualify semiconductor st...

Method and device for characterizing a wafer patterned using at lea...

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Electron beam source and method of manufacturing the same

Cross-section systems and methods

Electron beam source and method of manufacturing the same

Ion sources, systems and methods

Ion sources, systems and methods

Ion sources, systems and methods

Patents Applicationslast 30 patents

INSPECTION SYSTEM AND INSPECTION METHOD TO QUALIFY SEMICONDUCTOR ST...

METHOD AND DEVICE FOR CHARACTERIZING A WAFER PATTERNED USING AT LEA...

ION SOURCES, SYSTEMS AND METHODS

ION SOURCES, SYSTEMS AND METHODS

ION SOURCES, SYSTEMS AND METHODS

ELECTRON BEAM SOURCE AND METHOD OF MANUFACTURING THE SAME

CROSS-SECTION SYSTEMS AND METHODS

ELECTRON BEAM SOURCE AND METHOD OF MANUFACTURING THE SAME

ION SOURCES, SYSTEMS AND METHODS

Ion sources, systems and methods

Ion sources, systems and methods