Ulrich Mantz

Person

Saxony, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Targets for measurements in semiconductor devices
- Patent number 7,427,774
- Issue date Sep 23, 2008
- Infineon Technologies AG
- Ulrich Mantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for measuring a surface profile of a sample
- Patent number 7,405,089
- Issue date Jul 29, 2008
- Infineon Technologies AG
- Harald Bloess
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for the characterization of a film
- Patent number 7,362,453
- Issue date Apr 22, 2008
- Infineon Technologies AG
- Ulrich Mantz
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for the depth-resolved characterization of a l...
- Patent number 7,358,491
- Issue date Apr 15, 2008
- Infineon Technologies AG
- Harald Bloeβ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for determining the depth of a buried structure
- Patent number 7,307,735
- Issue date Dec 11, 2007
- Infineon Technologies AG
- Thomas Hecht
- G01 - MEASURING TESTING
Information Patent Grant
Noninvasive method for characterizing and identifying embedded micr...
- Patent number 7,262,837
- Issue date Aug 28, 2007
- Infineon Technologies AG
- Pierre-Yves Guittet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical measurement system and method
- Patent number 7,046,363
- Issue date May 16, 2006
- Infineon Technologies AG
- Alexander Michaelis
- G01 - MEASURING TESTING
Information Patent Grant
In-situ method for measuring the endpoint of a resist recess etch p...
- Patent number 6,486,675
- Issue date Nov 26, 2002
- Infineon Technologies AG
- Venkatachalam C. Jaiprakash
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for the depth-resolved characterization of lay...
- Publication number 20060076494
- Publication date Apr 13, 2006
- Infineon Technologies AG
- Harald Bloess
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for measuring a surface profile of a sample
- Publication number 20050258365
- Publication date Nov 24, 2005
- Harald Bloess
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and device for monitoring the etching operation for a regula...
- Publication number 20050239223
- Publication date Oct 27, 2005
- Infineon Technologies AG
- Ulrich Mantz
- G01 - MEASURING TESTING
Information Patent Application
Method for determining or inspecting a property of a patterned layer
- Publication number 20050118735
- Publication date Jun 2, 2005
- Ulrich Mantz
- G01 - MEASURING TESTING
Information Patent Application
Method for the characterization of a film
- Publication number 20050095731
- Publication date May 5, 2005
- Infineon Technologies AG
- Ulrich Mantz
- G01 - MEASURING TESTING
Information Patent Application
Noninvasive method for characterizing and identifying embedded micr...
- Publication number 20050018171
- Publication date Jan 27, 2005
- Pierre-Yves Guittet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for determining the depth of a buried structure
- Publication number 20050003642
- Publication date Jan 6, 2005
- Infineon Technologies AG
- Thomas Hecht
- G01 - MEASURING TESTING
Information Patent Application
Optical measurement system and method
- Publication number 20040046958
- Publication date Mar 11, 2004
- Infineon Technologies AG
- Alexander Michaelis
- G01 - MEASURING TESTING

Ulrich Mantz

Person

Patents Grantslast 30 patents

Targets for measurements in semiconductor devices

Method and apparatus for measuring a surface profile of a sample

Method for the characterization of a film

Method and apparatus for the depth-resolved characterization of a l...

Method for determining the depth of a buried structure

Noninvasive method for characterizing and identifying embedded micr...

Optical measurement system and method

In-situ method for measuring the endpoint of a resist recess etch p...

Patents Applicationslast 30 patents

Method and apparatus for the depth-resolved characterization of lay...

Method and apparatus for measuring a surface profile of a sample

Method and device for monitoring the etching operation for a regula...

Method for determining or inspecting a property of a patterned layer

Method for the characterization of a film

Noninvasive method for characterizing and identifying embedded micr...

Method for determining the depth of a buried structure

Optical measurement system and method