Ulrich Matejka

Person

Jena, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for characterizing a microlithographic mask
- Patent number 11,914,303
- Issue date Feb 27, 2024
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for detecting an object structure and apparatus for carrying...
- Patent number 11,892,769
- Issue date Feb 6, 2024
- Carl Zeiss SMT GmbH
- Beat Marco Mout
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for a scanning probe microscope
- Patent number 11,796,563
- Issue date Oct 24, 2023
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for characterizing a microlithographic mask
- Patent number 11,619,882
- Issue date Apr 4, 2023
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for a scanning probe microscope
- Patent number 11,237,185
- Issue date Feb 1, 2022
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for characterizing a microlithographic mask
- Patent number 11,112,702
- Issue date Sep 7, 2021
- Carl Zeiss SMT GmbH
- Sven Martin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for detecting a structure of a lithography mask and device f...
- Patent number 11,079,338
- Issue date Aug 3, 2021
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Grant
Detection device for detecting a structure on an area portion of a...
- Patent number 11,029,259
- Issue date Jun 8, 2021
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for characterizing a mask for microlithography
- Patent number 10,698,318
- Issue date Jun 30, 2020
- Carl Zeiss SMT GmbH
- Holger Seitz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for three-dimensionally measuring a 3D aerial image of a lit...
- Patent number 10,634,886
- Issue date Apr 28, 2020
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G02 - OPTICS
Information Patent Grant
Imaging optical unit for a metrology system for examining a lithogr...
- Patent number 10,606,048
- Issue date Mar 31, 2020
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G02 - OPTICS
Information Patent Grant
Illumination optical unit for a metrology system and metrology syst...
- Patent number 10,578,881
- Issue date Mar 3, 2020
- Carl Zeiss AG
- Thomas Frank
- G02 - OPTICS
Information Patent Grant
Illumination optical unit for a metrology system and metrology syst...
- Patent number 10,168,539
- Issue date Jan 1, 2019
- Carl Zeiss SMT GmbH
- Thomas Frank
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for three-dimensionally measuring a 3D aerial image of a lit...
- Patent number 10,068,325
- Issue date Sep 4, 2018
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical unit for a metrology system and metrology syst...
- Patent number 9,904,060
- Issue date Feb 27, 2018
- Carl Zeiss AG
- Thomas Frank
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Emulation of reproduction of masks corrected by local density varia...
- Patent number 9,535,244
- Issue date Jan 3, 2017
- Carl Zeiss SMT GmbH
- Holger Seitz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for simulating an aerial image
- Patent number 9,207,544
- Issue date Dec 8, 2015
- Carl Zeiss SMS GmbH
- Ulrich Matejka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask inspection microscope with variable illumination setting
- Patent number 8,970,951
- Issue date Mar 3, 2015
- Carl Zeiss SMS GmbH
- Ulrich Matejka
- G02 - OPTICS
Information Patent Grant
Method and apparatus for measuring of masks for the photo-lithography
- Patent number 8,730,474
- Issue date May 20, 2014
- Carl Zeiss SMS GmbH
- Thomas Scheruebl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microscope imaging system and method for emulating a high aperture...
- Patent number RE44216
- Issue date May 14, 2013
- Carl Zeiss SMS GmbH
- Michael Totzeck
- 359 - Optical: systems and elements

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT APPARATUS AND METHOD FOR INSPECTING PHOTOMASKS INTENDED...
- Publication number 20240353757
- Publication date Oct 24, 2024
- Christian Roedel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SENSOR ARRANGEMENT FOR ARRANGEMENT ON A MEASUREMENT CHAMBER, APPARA...
- Publication number 20240302290
- Publication date Sep 12, 2024
- Carl Zeiss SMT GMBH
- Lutz BREKERBOHM
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND MEASURING DEVICE FOR INSPECTING PHOTOMASKS, AND EUV CAMERA
- Publication number 20240295828
- Publication date Sep 5, 2024
- Carl Zeiss SMT GMBH
- Senthil Lakshmanan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT APPARATUS, METHOD FOR OPERATING A MASK-METROLOGY MEASUR...
- Publication number 20240255857
- Publication date Aug 1, 2024
- Carl Zeiss SMT GMBH
- Jan Reisloehner
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK
- Publication number 20240152057
- Publication date May 9, 2024
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR CHARACTERIZATION OF A MICROLITHOGRAPHY MASK
- Publication number 20240061328
- Publication date Feb 22, 2024
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL SYSTEM, IN PARTICULAR FOR CHARACTERIZING A MICROLITHOGRAPHY...
- Publication number 20230221571
- Publication date Jul 13, 2023
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G02 - OPTICS
Information Patent Application
DEVICE AND METHOD FOR MEASURING SUBSTRATES FOR SEMICONDUCTOR LITHOG...
- Publication number 20220276571
- Publication date Sep 1, 2022
- Carl Zeiss SMT GMBH
- Dirk Seidel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE
- Publication number 20220146548
- Publication date May 12, 2022
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK
- Publication number 20220075272
- Publication date Mar 10, 2022
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK
- Publication number 20210397099
- Publication date Dec 23, 2021
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETECTING AN OBJECT STRUCTURE AND APPARATUS FOR CARRYING...
- Publication number 20210081693
- Publication date Mar 18, 2021
- Carl Zeiss SMT GMBH
- Beat Marco Mout
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEVICE AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK
- Publication number 20210063892
- Publication date Mar 4, 2021
- Carl Zeiss SMT GMBH
- Sven Martin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION DEVICE FOR DETECTING A STRUCTURE ON AN AREA PORTION OF A...
- Publication number 20200191728
- Publication date Jun 18, 2020
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE
- Publication number 20200025796
- Publication date Jan 23, 2020
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DETECTING A STRUCTURE OF A LITHOGRAPHY MASK AND DEVICE F...
- Publication number 20190391087
- Publication date Dec 26, 2019
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...
- Publication number 20190121145
- Publication date Apr 25, 2019
- Carl-Zeiss AG
- Thomas Frank
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR CHARACTERIZING A MASK FOR MICROLITHOGRAPHY
- Publication number 20190011839
- Publication date Jan 10, 2019
- Carl Zeiss SMT GMBH
- Holger Seitz
- G02 - OPTICS
Information Patent Application
METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LIT...
- Publication number 20180357758
- Publication date Dec 13, 2018
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...
- Publication number 20180173001
- Publication date Jun 21, 2018
- Carl-Zeiss AG
- Thomas Frank
- G02 - OPTICS
Information Patent Application
METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LIT...
- Publication number 20170132782
- Publication date May 11, 2017
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G02 - OPTICS
Information Patent Application
IMAGING OPTICAL UNIT FOR A METROLOGY SYSTEM FOR EXAMINING A LITHOGR...
- Publication number 20170131528
- Publication date May 11, 2017
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G02 - OPTICS
Information Patent Application
EMULATION OF REPRODUCTION OF MASKS CORRECTED BY LOCAL DENSITY VARIA...
- Publication number 20150198798
- Publication date Jul 16, 2015
- CARL ZEISS SMS GMBH
- Holger Seitz
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...
- Publication number 20150001408
- Publication date Jan 1, 2015
- Carl-Zeiss AG
- Thomas Frank
- G01 - MEASURING TESTING
Information Patent Application
Method For Simulating An Aerial Image
- Publication number 20120320183
- Publication date Dec 20, 2012
- Ulrich Matejka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Ulrich Matejka

Person

Patents Grantslast 30 patents

Apparatus and method for characterizing a microlithographic mask

Method for detecting an object structure and apparatus for carrying...

Apparatus and method for a scanning probe microscope

Method and apparatus for characterizing a microlithographic mask

Apparatus and method for a scanning probe microscope

Device and method for characterizing a microlithographic mask

Method for detecting a structure of a lithography mask and device f...

Detection device for detecting a structure on an area portion of a...

Method and device for characterizing a mask for microlithography

Method for three-dimensionally measuring a 3D aerial image of a lit...

Imaging optical unit for a metrology system for examining a lithogr...

Illumination optical unit for a metrology system and metrology syst...

Illumination optical unit for a metrology system and metrology syst...

Method for three-dimensionally measuring a 3D aerial image of a lit...

Illumination optical unit for a metrology system and metrology syst...

Emulation of reproduction of masks corrected by local density varia...

Method for simulating an aerial image

Mask inspection microscope with variable illumination setting

Method and apparatus for measuring of masks for the photo-lithography

Microscope imaging system and method for emulating a high aperture...

Patents Applicationslast 30 patents

MEASUREMENT APPARATUS AND METHOD FOR INSPECTING PHOTOMASKS INTENDED...

SENSOR ARRANGEMENT FOR ARRANGEMENT ON A MEASUREMENT CHAMBER, APPARA...

METHOD AND MEASURING DEVICE FOR INSPECTING PHOTOMASKS, AND EUV CAMERA

MEASUREMENT APPARATUS, METHOD FOR OPERATING A MASK-METROLOGY MEASUR...

APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK

METHOD AND APPARATUS FOR CHARACTERIZATION OF A MICROLITHOGRAPHY MASK

OPTICAL SYSTEM, IN PARTICULAR FOR CHARACTERIZING A MICROLITHOGRAPHY...

DEVICE AND METHOD FOR MEASURING SUBSTRATES FOR SEMICONDUCTOR LITHOG...

APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE

METHOD AND APPARATUS FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK

APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK

METHOD FOR DETECTING AN OBJECT STRUCTURE AND APPARATUS FOR CARRYING...

DEVICE AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK

DETECTION DEVICE FOR DETECTING A STRUCTURE ON AN AREA PORTION OF A...

APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE

METHOD FOR DETECTING A STRUCTURE OF A LITHOGRAPHY MASK AND DEVICE F...

ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...

METHOD AND DEVICE FOR CHARACTERIZING A MASK FOR MICROLITHOGRAPHY

METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LIT...

ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...

METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LIT...

IMAGING OPTICAL UNIT FOR A METROLOGY SYSTEM FOR EXAMINING A LITHOGR...

EMULATION OF REPRODUCTION OF MASKS CORRECTED BY LOCAL DENSITY VARIA...

ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...

Method For Simulating An Aerial Image