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Ulrich Mayer
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Dresden, DE
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Patents Grants
last 30 patents
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Patent Grant
Increased density of low-K dielectric materials in semiconductor de...
Patent number
8,741,787
Issue date
Jun 3, 2014
GLOBALFOUNDRIES Inc.
Ulrich Mayer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
UV irradiance monitoring in semiconductor processing using a temper...
Patent number
8,518,720
Issue date
Aug 27, 2013
GLOBALFOUNDRIES Inc.
Ulrich Mayer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a dielectric cap layer for a copper metallization...
Patent number
8,211,795
Issue date
Jul 3, 2012
Advanced Micro Devices, Inc.
Joerg Hohage
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle reduction in PECVD processes for depositing low-k material...
Patent number
7,998,882
Issue date
Aug 16, 2011
GLOBALFOUNDRIES Inc.
Ulrich Mayer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
ULTRAVIOLET (UV)-REFLECTING FILM FOR BEOL PROCESSING
Publication number
20120235304
Publication date
Sep 20, 2012
GLOBALFOUNDRIES INC.
Torsten Huisinga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UV IRRADIANCE MONITORING IN SEMICONDUCTOR PROCESSING USING A TEMPER...
Publication number
20110053294
Publication date
Mar 3, 2011
Ulrich Mayer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INCREASED DENSITY OF LOW-K DIELECTRIC MATERIALS IN SEMICONDUCTOR DE...
Publication number
20110027989
Publication date
Feb 3, 2011
Ulrich MAYER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE REDUCTION IN PECVD PROCESSES FOR DEPOSITING LOW-K MATERIAL...
Publication number
20100055899
Publication date
Mar 4, 2010
Ulrich Mayer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING A DIELECTRIC CAP LAYER FOR A COPPER METALLIZATION...
Publication number
20080286966
Publication date
Nov 20, 2008
Joerg Hohage
H01 - BASIC ELECTRIC ELEMENTS