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Ulrich Niemann
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San Diego, CA, US
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last 30 patents
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Patent Grant
Nonwoven screens for dust trapping in laser discharge chambers
Patent number
11,614,012
Issue date
Mar 28, 2023
Cymer, LLC
Ulrich Niemann
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Patents Applications
last 30 patents
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Patent Application
PACKED-BED FILTER FOR METAL FLUORIDE DUST TRAPPING IN LASER DISCHAR...
Publication number
20230008480
Publication date
Jan 12, 2023
CYMER, LLC
Ulrich Niemann
B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
Information
Patent Application
NONWOVEN SCREENS FOR DUST TRAPPING IN LASER DISCHARGE CHAMBERS
Publication number
20200332689
Publication date
Oct 22, 2020
CYMER, LLC
Ulrich Niemann
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL