Membership
Tour
Register
Log in
Ulrich Pohlmann
Follow
Person
Jena, DE
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Overlay mark design for electron beam overlay
Patent number
12,055,859
Issue date
Aug 6, 2024
Inna Steely-Tarshish
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Overlay mark design for electron beam overlay
Patent number
11,862,524
Issue date
Jan 2, 2024
Inna Steely-Tarshish
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Overlay design for electron beam and scatterometry overlay measurem...
Patent number
11,720,031
Issue date
Aug 8, 2023
KLA Corporation
Inna Steely-Tarshish
G01 - MEASURING TESTING
Information
Patent Grant
Overlay mark design for electron beam overlay
Patent number
11,703,767
Issue date
Jul 18, 2023
Inna Steely-Tarshish
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multi-stage, multi-zone substrate positioning systems
Patent number
11,637,030
Issue date
Apr 25, 2023
KLA Corporation
Yoram Uziel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Performance optimized scanning sequence for eBeam metrology and ins...
Patent number
11,209,737
Issue date
Dec 28, 2021
KLA Corporation
Henning Stoschus
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Systems and methods for device-correlated overlay metrology
Patent number
10,474,040
Issue date
Nov 12, 2019
KLA-Tencor Corporation
Frank Laske
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Overlay measurements of overlapping target structures based on symm...
Patent number
10,473,460
Issue date
Nov 12, 2019
KLA-Tencor Corporation
Nadav Gutman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for reticle handling in an EUV reticle inspec...
Patent number
9,851,643
Issue date
Dec 26, 2017
KLA-Tencor Corporation
Francis Charles Chilese
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Apparatus and method for the determination of the position of a dis...
Patent number
8,125,653
Issue date
Feb 28, 2012
Vistec Semiconductor Systems Jena GmbH
Gert Weniger
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
OVERLAY MARK DESIGN FOR ELECTRON BEAM OVERLAY
Publication number
20230324810
Publication date
Oct 12, 2023
KLA Corporation
Inna Steely-Tarshish
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OVERLAY MARK DESIGN FOR ELECTRON BEAM OVERLAY
Publication number
20220415725
Publication date
Dec 29, 2022
KLA Corporation
Inna Steely-Tarshish
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OVERLAY MARK DESIGN FOR ELECTRON BEAM OVERLAY
Publication number
20220413395
Publication date
Dec 29, 2022
KLA Corporation
Inna Steely-Tarshish
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OVERLAY DESIGN FOR ELECTRON BEAM AND SCATTEROMETRY OVERLAY MEASUREM...
Publication number
20220413394
Publication date
Dec 29, 2022
KLA Corporation
Inna Steely-Tarshish
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Performance Optimized Scanning Sequence for eBeam Metrology and Ins...
Publication number
20210405540
Publication date
Dec 30, 2021
KLA Corporation
Henning Stoschus
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Multi-Stage, Multi-Zone Substrate Positioning Systems
Publication number
20200402827
Publication date
Dec 24, 2020
KLA Corporation
Yoram Uziel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Overlay Measurements of Overlapping Target Structures Based on Symm...
Publication number
20190178639
Publication date
Jun 13, 2019
KLA-Tencor Corporation
Nadav Gutman
G01 - MEASURING TESTING
Information
Patent Application
SYSTEMS AND METHODS FOR DEVICE-CORRELATED OVERLAY METROLOGY
Publication number
20190179231
Publication date
Jun 13, 2019
KLA-Tencor Corporation
Frank Laske
G01 - MEASURING TESTING
Information
Patent Application
Apparatus And Methods For Reticle Handling In An EUV Reticle Inspec...
Publication number
20130255407
Publication date
Oct 3, 2013
Francis Charles Chilese
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
APPARATUS AND METHOD FOR THE DETERMINATION OF THE POSITION OF A DIS...
Publication number
20100085582
Publication date
Apr 8, 2010
Vistec Semiconductor Systems Jena GmbH
Gert Weniger
H01 - BASIC ELECTRIC ELEMENTS