Ulrich SCHÖNHOFF

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Ulm, DE

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus, positioning system for use in a lithographi...
- Patent number 9,958,793
- Issue date May 1, 2018
- ASML Netherlands B.V.
- Roan Marinus Westerhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and thermal optical manipulator control method
- Patent number 8,861,102
- Issue date Oct 14, 2014
- ASML Netherlands B.V.
- Bastiaan Stephanus Hendricus Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and thermal optical manipulator control method
- Patent number 8,064,151
- Issue date Nov 22, 2011
- ASML Netherlands B.V.
- Bastiaan Stephanus Hendricus Jansen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
Lithographic Apparatus and Thermal Optical Manipulator Control Method
- Publication number 20110273682
- Publication date Nov 10, 2011
- ASML NETHERLANDS B.V.
- Bastiaan Stephanus Hendricus JANSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY