Ulrich Schoenhoff

Person

Neu-Ulm, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Compensation of creep effects in an imaging device
- Patent number 11,703,770
- Issue date Jul 18, 2023
- Carl Zeiss SMT GmbH
- Eylem Bektas Knauf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system, in particular for a microlithographic projection ex...
- Patent number 10,838,306
- Issue date Nov 17, 2020
- Carl Zeiss SMT GmbH
- Ulrich Schoenhoff
- G02 - OPTICS
Information Patent Grant
Arrangement for actuating an element in a microlithographic project...
- Patent number 10,185,221
- Issue date Jan 22, 2019
- Carl Zeiss SMT GmbH
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Grant
Arrangement for manipulating the position of an element
- Patent number 10,108,097
- Issue date Oct 23, 2018
- Carl Zeiss SMT GmbH
- Ulrich Schoenhoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Arrangement for actuating an element in a microlithographic project...
- Patent number 9,841,682
- Issue date Dec 12, 2017
- Carl Zeiss SMT GmbH
- Sascha Bleidistel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Arrangement for actuating an element in a microlithographic project...
- Patent number 9,568,837
- Issue date Feb 14, 2017
- Carl Zeiss SMT GmbH
- Sascha Bleidistel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Arrangement for mounting an optical element
- Patent number 9,448,384
- Issue date Sep 20, 2016
- Carl Zeiss SMT GmbH
- Michael Erath
- G02 - OPTICS
Information Patent Grant
Arrangement for mounting an optical element, in particular in an EU...
- Patent number 9,410,662
- Issue date Aug 9, 2016
- Carl Zeiss SMT GmbH
- Bernhard Geuppert
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Arrangement for actuating an element in a microlithographic project...
- Patent number 9,304,404
- Issue date Apr 5, 2016
- Carl Zeiss SMT GmbH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Arrangement for actuating an element in a projection exposure appar...
- Patent number 9,081,292
- Issue date Jul 14, 2015
- Carl Zeiss SMT GmbH
- Markus Hauf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical element and method
- Patent number 8,891,172
- Issue date Nov 18, 2014
- Carl Zeiss SMT GmbH
- Eric Eva
- G02 - OPTICS
Information Patent Grant
Arrangement for actuating an element in a microlithographic project...
- Patent number 8,786,826
- Issue date Jul 22, 2014
- Carl Zeiss SMT GmbH
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Grant
Optical element and method
- Patent number 8,508,854
- Issue date Aug 13, 2013
- Carl Zeiss SMT GmbH
- Eric Eva
- G02 - OPTICS
Information Patent Grant
Optical correction device
- Patent number 8,325,322
- Issue date Dec 4, 2012
- Carl Zeiss SMT GmbH
- Markus Hauf
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
VIBRATION ISOLATOR FOR SUPPORTING A PAYLOAD
- Publication number 20230279919
- Publication date Sep 7, 2023
- Carl Zeiss SMT GMBH
- Alexander Petrus Josephus VAN LANKVELT
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE
- Publication number 20210405358
- Publication date Dec 30, 2021
- Carl Zeiss SMT GMBH
- Eylem Bektas Knauf
- G02 - OPTICS
Information Patent Application
COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE
- Publication number 20210405359
- Publication date Dec 30, 2021
- Carl Zeiss SMT GMBH
- Eylem Bektas Knauf
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EX...
- Publication number 20180246416
- Publication date Aug 30, 2018
- Carl Zeiss SMT GMBH
- Ulrich Schoenhoff
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...
- Publication number 20180181005
- Publication date Jun 28, 2018
- Carl Zeiss SMT GMBH
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR MANIPULATING THE POSITION OF AN ELEMENT
- Publication number 20170329238
- Publication date Nov 16, 2017
- Carl Zeiss SMT GMBH
- Ulrich Schoenhoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...
- Publication number 20170153553
- Publication date Jun 1, 2017
- Carl Zeiss SMT GMBH
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...
- Publication number 20160054661
- Publication date Feb 25, 2016
- Carl Zeiss SMT GMBH
- Sascha Bleidistel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...
- Publication number 20140300882
- Publication date Oct 9, 2014
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...
- Publication number 20140204356
- Publication date Jul 24, 2014
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...
- Publication number 20140043596
- Publication date Feb 13, 2014
- ASML NETHERLANDS B.V.
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ARRANGEMENT FOR ACTUATING AN ELEMENT IN A PROJECTION EXPOSURE APPAR...
- Publication number 20140016109
- Publication date Jan 16, 2014
- Markus Hauf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ARRANGEMENT FOR MOUNTING AN OPTICAL ELEMENT
- Publication number 20130314681
- Publication date Nov 28, 2013
- Michael Erath
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR MOUNTING AN OPTICAL ELEMENT, IN PARTICULAR IN AN EU...
- Publication number 20130314771
- Publication date Nov 28, 2013
- Bernhard Geuppert
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT AND METHOD
- Publication number 20110080569
- Publication date Apr 7, 2011
- Carl Zeiss SMT GMBH
- Eric Eva
- G02 - OPTICS
Information Patent Application
OPTICAL CORRECTION DEVICE
- Publication number 20100201958
- Publication date Aug 12, 2010
- Carl Zeiss SMT AG
- Markus Hauf
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT AND METHOD
- Publication number 20090257032
- Publication date Oct 15, 2009
- Carl Zeiss SMT AG
- Eric Eva
- G02 - OPTICS

Ulrich Schoenhoff

Person

Patents Grantslast 30 patents

Compensation of creep effects in an imaging device

Optical system, in particular for a microlithographic projection ex...

Arrangement for actuating an element in a microlithographic project...

Arrangement for manipulating the position of an element

Arrangement for actuating an element in a microlithographic project...

Arrangement for actuating an element in a microlithographic project...

Arrangement for mounting an optical element

Arrangement for mounting an optical element, in particular in an EU...

Arrangement for actuating an element in a microlithographic project...

Arrangement for actuating an element in a projection exposure appar...

Optical element and method

Arrangement for actuating an element in a microlithographic project...

Optical element and method

Optical correction device

Patents Applicationslast 30 patents

VIBRATION ISOLATOR FOR SUPPORTING A PAYLOAD

COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE

COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE

OPTICAL SYSTEM, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EX...

ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...

ARRANGEMENT FOR MANIPULATING THE POSITION OF AN ELEMENT

ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...

ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...

ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...

ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...

ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...

ARRANGEMENT FOR ACTUATING AN ELEMENT IN A PROJECTION EXPOSURE APPAR...

ARRANGEMENT FOR MOUNTING AN OPTICAL ELEMENT

ARRANGEMENT FOR MOUNTING AN OPTICAL ELEMENT, IN PARTICULAR IN AN EU...

OPTICAL ELEMENT AND METHOD

OPTICAL CORRECTION DEVICE

OPTICAL ELEMENT AND METHOD