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Ulrich Stroessner
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Jena, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Microscope for reticle inspection with variable illumination settings
Patent number
9,116,447
Issue date
Aug 25, 2015
Carl Zeiss SMS GmbH
Ulrich Stroessner
G02 - OPTICS
Information
Patent Grant
Method and apparatus for measuring structures on photolithography m...
Patent number
8,736,849
Issue date
May 27, 2014
Carl Zeiss SMS GmbH
Ulrich Stroessner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for analyzing masks for photolithography
Patent number
8,718,354
Issue date
May 6, 2014
Carl Zeiss SMS GmbH
Ulrich Stroessner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining intensity distribution in the image plane of...
Patent number
7,961,297
Issue date
Jun 14, 2011
Carl Zeiss SMS GmbH
Joern Greif-Wuestenbecker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for analysing the imaging behavior of an optical...
Patent number
7,626,689
Issue date
Dec 1, 2009
Carl Zeiss SMS GmbH
Ulrich Stroessner
G01 - MEASURING TESTING
Information
Patent Grant
Imaging system for emulation of a high aperture scanning system
Patent number
7,535,640
Issue date
May 19, 2009
Carl Zeiss SMS GmbH
Michael Totzeck
G02 - OPTICS
Information
Patent Grant
Microscope imaging system and method for emulating a high aperture...
Patent number
7,286,284
Issue date
Oct 23, 2007
Carl Zeiss SMS GmbH
Michael Totzeck
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
MASK INSPECTION MICROSCOPE WITH VARIABLE ILLUMINATION SETTING
Publication number
20120162755
Publication date
Jun 28, 2012
CARL ZEISS SMS GMBH
Ulrich Stroessner
G02 - OPTICS
Information
Patent Application
METHOD AND APPARATUS FOR MEASURING STRUCTURES ON PHOTOLITHOGRAPHY M...
Publication number
20110242544
Publication date
Oct 6, 2011
CARL ZEISS SMS GMBH
Ulrich Stroessner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR ANALYZING MASKS FOR PHOTOLITHOGRAPHY
Publication number
20110188732
Publication date
Aug 4, 2011
CARL ZEISS SMS GMBH
Ulrich Stroessner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MICROSCOPE FOR RETICLE INSPECTION WITH VARIABLE ILLUMINATION SETTINGS
Publication number
20110164313
Publication date
Jul 7, 2011
CARL ZEISS SMS GMBH
Ulrich Stroessner
G02 - OPTICS
Information
Patent Application
APPARATUS AND METHOD FOR MEASURING THE POSITIONS OF MARKS ON A MASK
Publication number
20100153059
Publication date
Jun 17, 2010
Gerd Klose
G01 - MEASURING TESTING
Information
Patent Application
Method for Determining Intensity Distribution in the Image Plane of...
Publication number
20080212060
Publication date
Sep 4, 2008
CARL ZEISS SMS GMBH
Joern Greif-Wuestenbecker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Polarizer device for generating a defined spatial distribution of p...
Publication number
20060028706
Publication date
Feb 9, 2006
Carl Zeiss SMT AG
Michael Totzeck
G02 - OPTICS
Information
Patent Application
Microscope imaging system and method for emulating a high aperture...
Publication number
20060012873
Publication date
Jan 19, 2006
Michael Totzeck
G02 - OPTICS
Information
Patent Application
Imaging system for emulation of a high aperture scanning system
Publication number
20060007541
Publication date
Jan 12, 2006
Michael Totzeck
G02 - OPTICS