Ulrich WEBER

Person

Ulm, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Projection lighting system for semiconductor lithography with an im...
- Patent number 10,969,699
- Issue date Apr 6, 2021
- Carl Zeiss SMT GmbH
- Ulrich Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Beam reverser module and optical power amplifier having such a beam...
- Patent number 10,777,958
- Issue date Sep 15, 2020
- Carl Zeiss SMT GmbH
- Michael Schall
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical element module with minimized parasitic loads
- Patent number 10,215,948
- Issue date Feb 26, 2019
- Carl Zeiss SMT GmbH
- Jens Kugler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical assembly, projection system, metrology system and EUV litho...
- Patent number 10,146,048
- Issue date Dec 4, 2018
- Carl Zeiss SMT GmbH
- Michael Brehm
- G02 - OPTICS
Information Patent Grant
Positioning unit and apparatus for adjustment of an optical element
- Patent number 10,133,021
- Issue date Nov 20, 2018
- Carl Zeiss SMT GmbH
- Ulrich Weber
- G02 - OPTICS
Information Patent Grant
Beam reverser module and optical power amplifier having such a beam...
- Patent number 9,843,153
- Issue date Dec 12, 2017
- Carl Zeiss SMT GmbH
- Michael Schall
- G02 - OPTICS
Information Patent Grant
Actuators and microlithography projection exposure systems and meth...
- Patent number 9,766,550
- Issue date Sep 19, 2017
- Carl Zeiss SMT GmbH
- Ulrich Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support elements for an optical element
- Patent number 9,709,895
- Issue date Jul 18, 2017
- Carl Zeiss SMT GmbH
- Jens Kugler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning unit and apparatus for adjustment of an optical element
- Patent number 9,664,873
- Issue date May 30, 2017
- Carl Zeiss SMT GmbH
- Ulrich Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning unit and apparatus for adjustment of an optical element
- Patent number 9,075,174
- Issue date Jul 7, 2015
- Carl Zeiss SMT GmbH
- Ulrich Weber
- G02 - OPTICS
Information Patent Grant
Support elements for an optical element
- Patent number 8,988,654
- Issue date Mar 24, 2015
- Carl Zeiss SMT GmbH
- Jens Kugler
- G02 - OPTICS
Information Patent Grant
Positioning unit and apparatus for adjustment of an optical element
- Patent number 8,760,777
- Issue date Jun 24, 2014
- Carl Zeiss SMT GmbH
- Ulrich Weber
- G02 - OPTICS
Information Patent Grant
Optical system with an exchangeable, manipulable correction arrange...
- Patent number 8,659,745
- Issue date Feb 25, 2014
- Carl Zeiss SMT GmbH
- Guido Limbach
- G02 - OPTICS
Information Patent Grant
Optical system with an exchangeable, manipulable correction arrange...
- Patent number 8,542,346
- Issue date Sep 24, 2013
- Carl Zeiss SMT GmbH
- Guido Limbach
- G02 - OPTICS
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 8,514,371
- Issue date Aug 20, 2013
- Carl Zeiss SMT GmbH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Holding arrangement for an optical element
- Patent number 8,508,868
- Issue date Aug 13, 2013
- Carl Zeiss SMT GmbH
- Ulrich Weber
- G02 - OPTICS
Information Patent Grant
Positioning unit and alignment device for an optical element
- Patent number 8,493,674
- Issue date Jul 23, 2013
- Carl Zeiss SMT GmbH
- Jens Kugler
- G02 - OPTICS
Information Patent Grant
Holding arrangement for an optical element
- Patent number 8,456,771
- Issue date Jun 4, 2013
- Carl Zeiss Laser Optics GmbH
- Ulrich Weber
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Positioning unit and alignment device for an optical element
- Patent number 8,416,515
- Issue date Apr 9, 2013
- Carl Zeiss SMT GmbH
- Ulrich Weber
- G02 - OPTICS
Information Patent Grant
Optical element module with minimized parasitic loads
- Patent number 8,351,139
- Issue date Jan 8, 2013
- Carl Zeiss SMT GmbH
- Jens Kugler
- G02 - OPTICS
Information Patent Grant
Positioning unit and alignment device for an optical element
- Patent number 8,035,903
- Issue date Oct 11, 2011
- Carl Zeiss SMT GmbH
- Ulrich Weber
- G02 - OPTICS
Information Patent Grant
Replacement device for an optical element
- Patent number 8,027,024
- Issue date Sep 27, 2011
- Carl Zeiss SMT GmbH
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical element module
- Patent number 7,986,472
- Issue date Jul 26, 2011
- Carl Zeiss SMT, AG.
- Jens Kugler
- G02 - OPTICS
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 7,961,294
- Issue date Jun 14, 2011
- Carl Zeiss SMT GmbH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reflecting optical element with eccentric optical passageway
- Patent number 7,760,327
- Issue date Jul 20, 2010
- Carl Zeiss SMT AG
- Hans-Jürgen Scherle
- G02 - OPTICS
Information Patent Grant
Positioning unit and alignment device for an optical element
- Patent number 7,738,193
- Issue date Jun 15, 2010
- Carl Zeiss SMT AG
- Ulrich Weber
- G02 - OPTICS
Information Patent Grant
Imaging device in a projection exposure machine
- Patent number 7,710,542
- Issue date May 4, 2010
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for preventing the displacement of an optical element
- Patent number 7,564,636
- Issue date Jul 21, 2009
- Carl Zeiss SMT AG
- Christian Zengerling
- G02 - OPTICS
Information Patent Grant
Support device for positioning an optical element
- Patent number 7,515,359
- Issue date Apr 7, 2009
- Carl Zeiss SMT AG
- Jens Kugler
- G02 - OPTICS
Information Patent Grant
Imaging device in a projection exposure machine
- Patent number 7,486,382
- Issue date Feb 3, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION LIGHTING SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY WITH AN IM...
- Publication number 20190384187
- Publication date Dec 19, 2019
- Carl Zeiss SMT GMBH
- Ulrich Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Beam Reverser Module and Optical Power Amplifier Having Such a Beam...
- Publication number 20180102620
- Publication date Apr 12, 2018
- Carl Zeiss SMT GMBH
- Michael Schall
- G02 - OPTICS
Information Patent Application
SUPPORT ELEMENTS FOR AN OPTICAL ELEMENT
- Publication number 20180024438
- Publication date Jan 25, 2018
- Carl Zeiss SMT GMBH
- Jens Kugler
- G02 - OPTICS
Information Patent Application
POSITIONING UNIT AND APPARATUS FOR ADJUSTMENT OF AN OPTICAL ELEMENT
- Publication number 20170351047
- Publication date Dec 7, 2017
- Carl Zeiss SMT GMBH
- Ulrich Weber
- G02 - OPTICS
Information Patent Application
OPTICAL ASSEMBLY, PROJECTION SYSTEM, METROLOGY SYSTEM AND EUV LITHO...
- Publication number 20170102539
- Publication date Apr 13, 2017
- Carl Zeiss SMT GMBH
- Michael BREHM
- G02 - OPTICS
Information Patent Application
POSITIONING UNIT AND APPARATUS FOR ADJUSTMENT OF AN OPTICAL ELEMENT
- Publication number 20160041360
- Publication date Feb 11, 2016
- Carl Zeiss SMT GMBH
- Ulrich Weber
- G02 - OPTICS
Information Patent Application
ACTUATORS AND MICROLITHOGRAPHY PROJECTION EXPOSURE SYSTEMS AND METH...
- Publication number 20150370176
- Publication date Dec 24, 2015
- Carl Zeiss SMT GMBH
- Ulrich Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Beam Reverser Module and Optical Power Amplifier Having Such a Beam...
- Publication number 20150340829
- Publication date Nov 26, 2015
- Carl Zeiss SMT GMBH
- Michael Schall
- G02 - OPTICS
Information Patent Application
SUPPORT ELEMENTS FOR AN OPTICAL ELEMENT
- Publication number 20150316853
- Publication date Nov 5, 2015
- Carl Zeiss SMT GMBH
- Jens Kugler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING UNIT AND APPARATUS FOR ADJUSTMENT OF AN OPTICAL ELEMENT
- Publication number 20140368933
- Publication date Dec 18, 2014
- Carl Zeiss SMT GMBH
- Ulrich Weber
- G02 - OPTICS
Information Patent Application
POSITIONING UNIT AND APPARATUS FOR ADJUSTMENT OF AN OPTICAL ELEMENT
- Publication number 20130286490
- Publication date Oct 31, 2013
- Ulrich Weber
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...
- Publication number 20130278911
- Publication date Oct 24, 2013
- Guido Limbach
- G02 - OPTICS
Information Patent Application
POSITIONING UNIT AND ALIGNMENT DEVICE FOR AN OPTICAL ELEMENT
- Publication number 20130135760
- Publication date May 30, 2013
- Carl Zeiss SMT GMBH
- Ulrich Weber
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT MODULE WITH MINIMIZED PARASITIC LOADS
- Publication number 20130100547
- Publication date Apr 25, 2013
- CARL ZEISS SMT GMBH
- Jens Kugler
- G02 - OPTICS
Information Patent Application
HOLDING ARRANGEMENT FOR AN OPTICAL ELEMENT
- Publication number 20120154935
- Publication date Jun 21, 2012
- Carl Zeiss SMT GMBH
- Ulrich Weber
- G02 - OPTICS
Information Patent Application
ACTUATORS AND MICROLITHOGRAPHY PROJECTION EXPOSURE SYSTEMS AND METH...
- Publication number 20120147344
- Publication date Jun 14, 2012
- Carl Zeiss SMT GMBH
- Ulrich Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HOLDING ARRANGEMENT FOR AN OPTICAL ELEMENT
- Publication number 20120140341
- Publication date Jun 7, 2012
- Carl Zeiss SMT GMBH
- Ulrich Weber
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUPPORT ELEMENTS FOR AN OPTICAL ELEMENT
- Publication number 20120067833
- Publication date Mar 22, 2012
- Carl Zeiss SMT GMBH
- Jens Kugler
- G02 - OPTICS
Information Patent Application
POSITIONING UNIT AND ALIGNMENT DEVICE FOR AN OPTICAL ELEMENT
- Publication number 20120019798
- Publication date Jan 26, 2012
- Carl Zeiss SMT GMBH
- Ulrich Weber
- G02 - OPTICS
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
- Publication number 20110199597
- Publication date Aug 18, 2011
- Carl Zeiss SMT GMBH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ACTUATORS AND MICROLITHOGRAPHY PROJECTION EXPOSURE SYSTEMS AND METH...
- Publication number 20110128521
- Publication date Jun 2, 2011
- Carl Zeiss SMT GMBH
- Ulrich Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING UNIT AND ALIGNMENT DEVICE FOR AN OPTICAL ELEMENT
- Publication number 20100245847
- Publication date Sep 30, 2010
- Carl Zeiss SMT AG
- Ulrich Weber
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT MODULE WITH MINIMIZED PARASITIC LOADS
- Publication number 20100214675
- Publication date Aug 26, 2010
- Carl Zeiss SMT AG
- Jens Kugler
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...
- Publication number 20090244509
- Publication date Oct 1, 2009
- Carl Zeiss SMT AG
- Guido Limbach
- G02 - OPTICS
Information Patent Application
Imaging Device in a Projection Exposure Machine
- Publication number 20090141258
- Publication date Jun 4, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
- Publication number 20090040487
- Publication date Feb 12, 2009
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
REPLACEMENT DEVICE FOR AN OPTICAL ELEMENT
- Publication number 20080174758
- Publication date Jul 24, 2008
- Carl Zeiss SMT AG
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE MACHINE
- Publication number 20080174757
- Publication date Jul 24, 2008
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Holding and positioning apparatus for an optical element
- Publication number 20070223116
- Publication date Sep 27, 2007
- Ulrich Weber
- G02 - OPTICS
Information Patent Application
Support Device for Positioning an Optical Element
- Publication number 20070216888
- Publication date Sep 20, 2007
- Jens Kugler
- G02 - OPTICS

Ulrich WEBER

Person

Patents Grantslast 30 patents

Projection lighting system for semiconductor lithography with an im...

Beam reverser module and optical power amplifier having such a beam...

Optical element module with minimized parasitic loads

Optical assembly, projection system, metrology system and EUV litho...

Positioning unit and apparatus for adjustment of an optical element

Beam reverser module and optical power amplifier having such a beam...

Actuators and microlithography projection exposure systems and meth...

Support elements for an optical element

Positioning unit and apparatus for adjustment of an optical element

Positioning unit and apparatus for adjustment of an optical element

Support elements for an optical element

Positioning unit and apparatus for adjustment of an optical element

Optical system with an exchangeable, manipulable correction arrange...

Optical system with an exchangeable, manipulable correction arrange...

Imaging device in a projection exposure facility

Holding arrangement for an optical element

Positioning unit and alignment device for an optical element

Holding arrangement for an optical element

Positioning unit and alignment device for an optical element

Optical element module with minimized parasitic loads

Positioning unit and alignment device for an optical element

Replacement device for an optical element

Optical element module

Imaging device in a projection exposure facility

Reflecting optical element with eccentric optical passageway

Positioning unit and alignment device for an optical element

Imaging device in a projection exposure machine

Device for preventing the displacement of an optical element

Support device for positioning an optical element

Imaging device in a projection exposure machine

Patents Applicationslast 30 patents

PROJECTION LIGHTING SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY WITH AN IM...

Beam Reverser Module and Optical Power Amplifier Having Such a Beam...

SUPPORT ELEMENTS FOR AN OPTICAL ELEMENT

POSITIONING UNIT AND APPARATUS FOR ADJUSTMENT OF AN OPTICAL ELEMENT

OPTICAL ASSEMBLY, PROJECTION SYSTEM, METROLOGY SYSTEM AND EUV LITHO...

POSITIONING UNIT AND APPARATUS FOR ADJUSTMENT OF AN OPTICAL ELEMENT

ACTUATORS AND MICROLITHOGRAPHY PROJECTION EXPOSURE SYSTEMS AND METH...

Beam Reverser Module and Optical Power Amplifier Having Such a Beam...

SUPPORT ELEMENTS FOR AN OPTICAL ELEMENT

POSITIONING UNIT AND APPARATUS FOR ADJUSTMENT OF AN OPTICAL ELEMENT

POSITIONING UNIT AND APPARATUS FOR ADJUSTMENT OF AN OPTICAL ELEMENT

OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...

POSITIONING UNIT AND ALIGNMENT DEVICE FOR AN OPTICAL ELEMENT

OPTICAL ELEMENT MODULE WITH MINIMIZED PARASITIC LOADS

HOLDING ARRANGEMENT FOR AN OPTICAL ELEMENT

ACTUATORS AND MICROLITHOGRAPHY PROJECTION EXPOSURE SYSTEMS AND METH...

HOLDING ARRANGEMENT FOR AN OPTICAL ELEMENT

SUPPORT ELEMENTS FOR AN OPTICAL ELEMENT

POSITIONING UNIT AND ALIGNMENT DEVICE FOR AN OPTICAL ELEMENT

IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY

ACTUATORS AND MICROLITHOGRAPHY PROJECTION EXPOSURE SYSTEMS AND METH...

POSITIONING UNIT AND ALIGNMENT DEVICE FOR AN OPTICAL ELEMENT

OPTICAL ELEMENT MODULE WITH MINIMIZED PARASITIC LOADS

OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...

Imaging Device in a Projection Exposure Machine

IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY

REPLACEMENT DEVICE FOR AN OPTICAL ELEMENT

IMAGING DEVICE IN A PROJECTION EXPOSURE MACHINE

Holding and positioning apparatus for an optical element

Support Device for Positioning an Optical Element