Uma Rames Krishna LAGUDA

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Potsdam, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Abrasive-free planarization for EUV mask substrates
- Patent number 9,097,994
- Issue date Aug 4, 2015
- Sematech, Inc.
- Suryadevara V. Babu
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
ABRASIVE-FREE PLANARIZATION FOR EUV MASK SUBSTRATES
- Publication number 20130209924
- Publication date Aug 15, 2013
- Suryadevara V. BABU
- H01 - BASIC ELECTRIC ELEMENTS